CHKD/CHKG

A18 A20 A22 A31 30 30 30 D D D D 30 g g g C Note) Female thread effective depth should be no more than twice the thread diameter. Note) Male thread effective length should be no more than 100 mm. Note) Male thread effective length should be no more than 100 mm. Note) Male thread effective length should be no more than 100 mm.

CY1

Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25

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(assuming approximately 30% dispersion.)

XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CE

14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5 49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

MY1

For detailed specifications, refer to page 8-30-1. Normally closed (NC = b contact), solid state switch (DF9G/F9H/Y7G/Y7H type) are also available. For details, refer to page 8-30-31to 8-30-32. D-A90 cannot be mounted on Series MY1HT.

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Air Cylinder Series CS1

to 1000 145 115 M14 x 1.5 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 16 15 31 19 35 1.5 98 30 to 1000 30 to 1000 161 128 M14 x 1.5 M30 x 1.5 56 53 40 90 59 43 14 17 36 22 39 1.5 35 to 1200 35 to 1200 182 144 18.5 M16 x 1.5 M36 x 1.5 106 63 60 45 70 48 17 20 41 26 39 2 30 to 1200 30 to 1200 204 162 115 18.5 M18 x 1.5 M40 x 1.5 111 63 60 50 74 48 17 20 46 26 39 2 30 to 1200 30

Cylinder with Lock Series CLS

to 1000 0.2 stroke 1/2 98 5 30 345 75 40 133 368 98 345 368 Up to 1000 30 to 1000 0.2 stroke 8 1/2 98 5 30 345 75 40 133 368 98 345 368 Up to 1200 30 to 1200 0.2 stroke 9 3/4 106 5 30 388.5 409.5 75 40 141 409.5 106 388.5 Up to 1200 30 to 1200 0.2 stroke 3/4 111 448 85 45 153 466 115 452 470 Up to 998 30 to 1200 0.2 stroke 3/4 111 468 90 45 153 486 120 477 495 30 to 1200 0.17 stroke 1 141

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

: A6 Symbol: A7 WA C C0.5 file chamfer AL B RD B AL MM AL MM MM DC 30 30 H 30 30 L W H W1 T H H H Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol:

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 D

MXS Series Air Slide Table

F A F Lr 6 6 6 Lr=24mm 0.020 0.04 0.04 0.015 0.03 0.03 Table deflection mm Table deflection mm Table deflection mm MXS6-10 MXS6-20 MXS6-30 MXS6-30 MXS6-20 MXS6-10 MXS6-40 MXS6-50 0.010 0.02 0.02 MXS6-20 MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 0 10 20 30 40 0 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 8 8 8 Lr=50mm 0.020

Basic type / Direct mount type Series CY3B/CY3R

50 CY1S Piston speed mm/s Piston speed mm/s Piston speed mm/s CY1L CY1H (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 CY1F 30 30 30 30 CYP 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D-X 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500

58

A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R ball AL MM 30 30 DA C R ball TP R ball A A H C H T W1 H H H Symbol:A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 DA MM 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol:

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.