MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Parallel Style Air Gripper Series MHZ

MHF 0 10 20 30 40 50 0 50 100 150 MHL Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHR MHZ2-40D 400 Pressure 0.7 MPa MHK Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 300 Gripping force (N) MHS 40 0.5 MPa 0.5 MPa 250 0.4 MPa 0.4 MPa 30 MHC 200 0.3 MPa 0.3 MPa 20 150 0.2 MPa MHT 0.2 MPa 100 10 50 MHY 0 10 20 30 40 50 60 0 50 100 150 200 MHW Gripping point L (mm) Gripping point

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

NCQ8

Note 6) Lead wire tolerance CD-P12 24 VDC 50 mA CD-P11 100 VAC 25 mA 200 VAC 12.5 mA Part No.

Compact Cylinder

32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Other intermediate strokes can be manufactured upon receipt of order.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

Mechanically Jointed Rodless Cylinder Series MY1

Mass m X-axis Y-axis Z-axis 20 Z W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

10

136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2 38 1/2 120 50 148 148 17 15 223 With Rod Boot [mm] Bore size [mm] d e f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51

MY1

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

Electric Actuator

, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 10 30 50 10 30 50 310, 180, 90 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-78 Gripper Step Motor (Servo/24 VDC) Series LEHF S Type (3 Fingers) Z Type (2 Fingers) With Dust Cover F Type (2 Fingers) Series LEHZ Series LEHZJ Series LEHS Opening/closing

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A 50 bore size is selected.

Electric Actuator

0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load [kg]

48

, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101 Front matter 2 Electric Actuators RotaryTable Step Motor (Servo/24 VDC) Miniature Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke Stroke Size

24

50 40 50 100 40 100 80 30 30 80 50, 63 50, 63 50, 63 20 20 32, 40 50, 63 32, 40 32, 40 25 32, 40 10 10 25 Load mass m [kg] Load mass m [kg] 20 20 5 5 16 25 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] (17) L = 50 mm, V = 400 mm/s (18) L = 100 mm, V = 400 mm/s 50 50 40 100 40 100 80 30 30 80 50, 63 50, 63 50, 63 20 20 40 50, 63

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Cylinder 50, 63, 80 RS1H M9W 50 D L Number of auto switches Bore size 50 63 80 50 mm 63 mm 80 mm (auto switch number mounted) Port thread type 2 pcs. 1 pc.