CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT HF3100A-UN M8 26.5 2-6.5 8 M8 145 1 165 3 M6 380 1 400 5 160 3 TF3005C-TX TX3020C-TX TF3030C-TX [Unit: mm] 3-M4 6-R3.25 length8 M4 M4 M4 3 M4 Approx.12.2 125 2 140 1 155 2 16 16 IN Approx.67.5 3 100 1 100 1 290 2 150 2 308 5 Approx.160 332 5 170 5 12 34 12.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-YB8 V V V V V V ZP3EA-YB12 V V V V V V V V Mounting nut w Seal washer (Sales unit: 5 pcs.) Part no.

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

C95

From 0.4 MPa Graph (6) m From 0.5MPa Graph (7) F 6-12-27 Series C95N Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 40 30 50 40 30 32 50 40 20 20 32 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OPTIONS AND PERIPHERAL EQUIPMENT HF3100A-UN [Unit: mm] TF3005C-TX/TX3020C-TX/TF3030C-TX [Unit: mm] 3-M4 6-R3.25 length8 M4 M4 M4 3 M4 Approx.12.2 125 2 140 1 155 2 16 16 IN Approx.67.5 100 1 100 1 3 290 2 150 2 308 5 Approx.160 332 5 170 5 11 34 11.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 Load point distance (mm) 100 1000 Load point distance (mm) LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

10

indicator) 4-wire (NPN) 5 V, 12 V F59F V V v v IC circuit Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA V V V v P4DW V V v Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit 100 V A93 V V V V Reed auto switch No 100 V or less A90 V V IC circuit Grommet Relay, PLC Yes 100 V, 200 V A54 V V V No 200 V or less A64 V V 2-wire 24 V 12 V A33

LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance (mm) LJ1H20 LJ1H30 10 20 10 Lateral load 100% 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 200 Amount of deflection (m) Amount of deflection (m) 200 100 100 50 50 20 20 10 10 Lateral load 100% 5 Lateral load 50% 5 Horizontal empty weight deflection

Integrated Controller

20 5000 mm/s2 5 10 10 mm/s2 0 100 200 300 400 500 0 100 200 300 400 500 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY25HC Horizontal/Lead 3 Vertical/Lead 3 120 40 35 30 25 20 15 10 5 0 20 40 60 80 100 120 140 160 100 Work load: W [kg] Work load: W [kg] 80 3000 mm/s2 3000 mm/s2 60 5000 mm/s2 40 20 10 mm/s2 0 50 100 150 200 250 0 0 Speed: V [mm/s] Speed: V [mm/s] 40 Easy to Operate EQYH Series Battery-less

Proposals for Energy Saving

5 6.5 7 8 8 10 12 19 (20.5) 21 20.5 Note 3) 9.5 10 12 17 18 18 20 22 5 5 5 5 5 20 25 32 40 50 63 80 100 9 depth 7 9 depth 7 9 depth 7 9 depth 7 11 depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 28 35 35 43 59 10.5 15 16 23 Note 1) Dimensions other than above are the same as the standard double acting single

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

LEC-OM02704CN

CC-Link 5 19 5 (4) CC-Link CC-Link (a) 1 (RYn1)(RYn2) DWELL 0 1 3 1 1 3 DWELL 0 1 1 1 5 20 5 (b) , 1 2541 255 0 DWELL 0 1 DWELL [ms](1) 1 0 1 2 0 1 3 0 0(2) 4 0 1 5 0 1 6 0 1 7 0 0(2) 1. 0 2. ,02 5 21 5 1 2 3 4 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 3.00 2000 0 3 3 10.00 1000 0 1 4 6.00 500 0 2(2) 1. 0 2. ,02 0 2 No.1 (100) No.1 (150

Table of Contents

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions: Desired number of pads 5 pcs.

Environment

(The lock cable is included when the motor with lock option is selected.) *7 Standard cable entry is (A) Axis side. i Cable length [m]*5, *8 o Driver type*5 25A25ANil Without cable 2 2 5 5 A 10 Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to

Cylinder with Lock

8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove