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/4 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR521 -E, VFR521 -D(Z) 3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/8 (PE port) 9 [20] Rc 1/8 (PE port) 8 Manual override (Non-locking) 2 11 [13] A B 2 [

LEC-OM069xx

Setting (byte) 1 to 65535 10 Pn80A 1st Linear Acceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80B 2nd Linear Acceleration Constant 1 2 100 reference units/s2 0 to 65535 100 reference Pn80C Acceleration Constant Switching Speed 1 2 0 units/s 1 to 65535 10 Pn80D 1st Linear Deceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80E 2nd Linear Deceleration Constant

NCG/CG1

24A Pivot bracket 100 40 mm 70 mm Note 1) Order two foot brackets per cylinder.

1

Series CS1 Series MB, Series MB1 Series MGG Bore size (mm) Bore size (mm) Bore size (mm) Port size Port size Port size 125 32 NPT 1/2 20 NPT 1/2 140 40, 50 NPT 3/4 25 NPT 1/8 160 63, 80 NPT 3/8 32 NPT 3/4 180 100 NPT 1/2 40 200 50 NPT 1/4 250 63 NPT 1 300 NPT 3/8 80 NPT 1/2 100 Standard model no.

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) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

Electric Actuator

Step Axis 1 Step No. 0 Posn 123.45 mm Speed 100 mm/s Monitor Axis 1 Step No. 1 Posn 12.34 mm Speed 10 mm/s It can be registered by SET after entering the values. Operation status can be checked. Teaching box screen Step Axis 1 Step No. 0 Posn 50.00 mm Speed 200 mm/s Step Axis 1 Step No. 1 Posn 80.00 mm Speed 100 mm/s #Data can be set with position and speed.

MG

1 CX 12 D-X 20Data 0.1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 (7) 50 Stroke or Less, V = 200 mm/s (8) Over 50 Stroke, V = 200 mm/s 300 300 100 100 80 100 100 80 63 50 50 63 50 Load weight m (kg) Load weight m (kg) 40 50 32 40 10 10 32 5 5 1 1 5 100 10 200 1 10 100 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-13

5 Port Solenoid Valve Series SY3000/5000/7000/9000

/surge voltage suppresser AC ( Hz) 50 60 1 100 VAC 2 200 VAC "YOZ" is not available.

Air Cylinder

8 62 107 116 25 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 111 120 32 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 113 122 40 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 143 154 With Rod Boot (mm) B3 e f h l ZZ Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

Series KV2 Fittings

(g) Bag/Box Quantity L 5/32 1/4 3/8 1/2 5/8 5/32 1/4 3/8 1/2 5/8 KV2E03-00 KV2E07-00 KV2E11-00 KV2E13-00 KV2E15-00 1/2-20 9/16-18 7/8-14 1-12 1 1/8-12 17.46 17.46 25.40 28.57 33.33 32.1 34.1 42.1 44.1 50.0 16 17 21 22 25 16 17 21 22 25 13.5 15.0 23.0 26.0 29.0 1.6 3.5 5.4 8.5 9.8 32 30 87 117 191 100/400 100/400 100/100 100/100 50/50 Female Bulkhead Connector KV2E_ _-_ _ L1 L2 M Thread H1

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270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8 1 Air Tank Series AT Model/Standard Specifications AT11C AT22C AT37C AT55C AT75C AT125C AT150C (1) AT220C (1) AT6C Model Fluid Tank capacity (l) 400 500 700 Compressed air 1000 1500 2000 3000 100 200 Max. operating pressure (MPa) Port size

CL

range (mm) A Bore (mm) 40 50 63 80 100 BF AL B B1 BN BQ C FD FT FY GA GB BP D FX FZ GC E GD FV GL GR H1 W/o rod boot to 500 to 600 to 600 to 750 to 750 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 100 110 130 160 180 8 11 11 13 16 71 81 101 119 133 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44

CATALOG VC10

AC DC PORTS PORTS 1/32 1/32 3/64 1/16 1/16 1/16 1/16 3/32 3/32 3/32 1/8 3/32 1/8 1/8 3/16 3/32 3/16 1/8 1/4 3/32 1/4 1/8 .024 .024 .052 .095 .095 .095 .095 .156 .156 .156 .284 .156 .284 .227 .500 .156 .500 .227 .700 .156 .700 .227 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 15 15 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 E23GG7DCCM E23HJ7DCCM

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AC DC PORTS PORTS 1/32 1/32 3/64 1/16 1/16 1/16 1/16 3/32 3/32 3/32 1/8 3/32 1/8 1/8 3/16 3/32 3/16 1/8 1/4 3/32 1/4 1/8 .024 .024 .052 .095 .095 .095 .095 .156 .156 .156 .284 .156 .284 .227 .500 .156 .500 .227 .700 .156 .700 .227 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 15 15 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 E23GG7DCCM E23HJ7DCCM

Step Motor Driver （ Pulse input type ）

0.00 0.00 ORG Correct 0.00 0.00 0.00 0.00 Sensor type 1 1 1 1 Option set1 1 1 1 1 Undefined parameter11 1 1 1 1 Undefined parameter12 1 1 1 1 LEY/LEYG Return to origin parameter default Model LEY16 / LEYG16 LEY25 / LEYG25 LEY32 / LEYG32 LEY40 / LEYG40 ORIG direction 2 2 2 2 Return to origin parameter default ORIG mode 1 1 1 1 ORIG limit 100 100 100 100 ORIG time 100 100 100 100 ORIG speed

Magnetically Coupled Rodless Cylinder

1 y, Z = 100 0.1 20 0.01 100 400 250 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Piston speed [mm/s] M2 M1, M3 [Graph 13] Allowable moment [Graph 11] Allowable moment 200 200 100 100 Moment M1, M3 [Nm] Moment M2 [Nm] CY1S25-Z CY1S25-Z 10 10 5 5 100 400 250 100 400 350 Piston speed [mm/s] Piston speed [mm/s] (1 Nm = 0.74 lbfft, 1 Kg = 2.2 lbs) Front matter 8 Series CY1S Calculation of

Combination Cylinder

800 601 to 1000 1001 to 1200 601 to 1000 1001 to 1200 751 to 1000 1001 to 1400 751 to 1000 1001 to 1500 30 40 45 50 76 92 112 136 Long stroke (50 to 100) 50 63 80 100 (mm) Stroke range (mm) Bore (mm) GR GL GD GC GB GA F E D C BQ BP BN B1 B AL A Without rod boot With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 40 50 63 80 100 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4

Cylinder with Lock

1 !5 !6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.