Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m)

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: -, Digital Pressure Switch: -, Exhaust Check Valve: -, Exhaust Solenoid Valve: -

Cylinder

Auto Switch/ Weight (gl) Auto Switch Mounting Position/ D-90, 0-97 1t a)D-90 U " 10 1'" -~) ", "" s Example) D97L e Operating range Switch 0-90, 97 4 22 Most sensitive position ~ ~-+-~--~Mounting bracket BP-1 with set screw Switch Mounting Bracket C .JL w 11 b)D-90 .. '... . ' WO~l)iJftIJ braCket I>$iticable . c)D-97 SwiJl:ht~e part No. .~ Gy'i r~~' . bOfe 0-90,97 BP-l 6, 10,15 ~ Auto Switch

Plate Cylinder with Lock Series MLU

unlocking port Front cylinder port P GC1 MM1 KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B

MLU

: (800) 258-9200-www.stevenengineering.com KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB

MLGC

Note 3) Common with cushion ring gasket A except for standard stroke of 20 and 25. 3.2-6 Fine Lock Cylinder with Guide Series MLGC Basic/With Rear Plate MLGClBl-l-R-l CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF Standard Stroke Stroke range (mm) AC AB AF B E AD A Bore size (mm) AA AE AP BP BZ C D F G GC MXW Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 20 25 32 40 75, 100, 125, 150, 200

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

NCQ2/CQ2

12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V IC circuit Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) 24 V Relay, PLC Yes Grommet Water resistant (2-color indication) IC circuit M9PAV M9PA M9BAV M9BA 3-wire (NPN equivalent) A96V A96 IC circuit 5 V Yes Grommet A93V A90V A93 A90 100 V 12 V Relay, PLC 2-wire 24 V IC circuit 100 V or less 5

Compact Cylinder

12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V IC circuit Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) 24 V Relay, PLC Yes Grommet Water resistant (2-color indication) IC circuit M9PAV M9PA M9BAV M9BA 3-wire (NPN equivalent) A96V A96 IC circuit 5 V Yes Grommet A93V A90V A93 A90 100 V 12 V Relay, PLC 2-wire 24 V IC circuit 100 V or less 5 V,

High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure

JXCx-OMT0023

No-fuse breaker Fuse Current [A] (Note 2) Driver Voltage (Note 1) Class Current [A] Voltage Magnetic contactor Not using power factor improving Using power factor AC [V] AC [V] improving reactor reactor LECSA2-S1 30A frame 5A 30A frame 5A 10A LECSA2-S3/ LECSA1-S1 30A frame 10A 30A frame 10A 240V T 15A 300V S-N10 LECSA2-S4/ LECSA1-S3 30A frame 15A 30A frame 10A 20A Note 1.

Made to Order

state auto switch Reed auto switch Terminal conduit 24 V Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color) 12 V Grommet Water resistant (2-color indicator) 5 V, 12 V 12 V 3-wire (NPN equivalent) IC circuit A96 5 V Yes Grommet A93 A90 A33 A34 A44 100 V 100 V or less Relay, PLC No 2-wire IC circuit PLC 12 V 24 V Terminal conduit Yes Relay, PLC 100 V, 200 V Din terminal

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

Vacuum Module Series ZX

V V V Vacuum port (V) M5 (or M6) 4.2 Pitch = 21 22.5 Vacuum port (V) M5 (or M6) Vacuum port (V) M5 (or M6) 919 Series ZX Vacuum port (V) Vacuum port (V) Vacuum Pump System Manifold: Type K1 Common EXH port (EXH.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

Electric Actuator

to 120 V 200 V to 230 V 100 V to 120 V 200 V to 230 V LECSA1 LECSA2 LECSB1 LECSB2 Feature(s) AC servo motor (Incremental encoder) S2, S3 AC servo motor (Adsolute encoder) S6, S7 Compatible motor !

LEC-OM071xx

Positioning completed n.09 Speed feedforward 1 V/1000 min-1 n.0A Torque feedforward 1 V/100% rated torque n.0B Active gain *1 1st gain: 1 V 2nd gain: 2 V Gain type indicated by output voltage. n.0C Completion of position reference Completed: 5 V Not completed: 0 V Completion indicated by output voltage. n.0D External encoder speed 1 V/1000 min-1 Value at motor shaft 1.

SV

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Metal Seal/Rubber Seal Series VQ Body Ported

24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73 0.84 Plug lead Cassette Plug-in Series VQ1000 Latching Latching Latching Latching Latching VQ131 1.0 0.84 P. 2-4-10 P. 2-4-8 VQ040 0.50 0.36 Series