CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Ionizer Nozzle type IZN10 Series IZS

With L-bracket B1 With pivoting bracket B2 With DIN rail mounting bracket B3 Output specification Refer to page 450.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Magnet: P (Built-in Strong Magnet), Clevis Width: A (16.5mm), Bore Size: 50mm, Port Type: Rc, Stroke: 100mm, Accessories: YA (Dbl Knuckle Joint, M6 w/Tap), Pedestal: None, Locking Direction: B (Retraction Locking), Port Position: 2 (Port on Left, By-pass Piping on Right), Switch Mtg Rod Position: Top (Or None in the Case of No Switch, No Mounting Rod), Auto Switch: P (No Switch, w/Mounting

Magnet: P (Built-in Strong Magnet), Clevis Width: A (16.5mm), Bore Size: 63mm, Port Type: Rc, Stroke: 100mm, Accessories: YA (Dbl Knuckle Joint, M6 w/Tap), Pedestal: None, Locking Direction: B (Retraction Locking), Port Position: 2 (Port on Left, By-pass Piping on Right), Switch Mtg Rod Position: Top (Or None in the Case of No Switch, No Mounting Rod), Auto Switch: P (No Switch, w/Mounting

Magnet: Built-in Strong Magnet, Clevis Width: 16.5mm, Bore Size: 50mm, Port Type: Rc, Stroke: 100mm, Accessories: Dbl Knuckle Joint, M6 w/Tap, Pedestal: None, Locking Direction: Retraction Locking, Port Position: Port on Left, By-pass Piping on Right, Switch Mtg Rod Position: Top (Or None in the Case of No Switch, No Mounting Rod), Auto Switch: No Switch, w/Mounting Rod, Lead Wire or Prewired

Magnet: Built-in Strong Magnet, Clevis Width: 16.5mm, Bore Size: 63mm, Port Type: Rc, Stroke: 100mm, Accessories: Dbl Knuckle Joint, M6 w/Tap, Pedestal: None, Locking Direction: Retraction Locking, Port Position: Port on Left, By-pass Piping on Right, Switch Mtg Rod Position: Top (Or None in the Case of No Switch, No Mounting Rod), Auto Switch: No Switch, w/Mounting Rod, Lead Wire or Prewired

ZSE F/ISE

500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 0.01 0.01 0.1 Rated pressure range Operating pressure range and regulating pressure range Proof pressure kPa MPa kgf/cm2 Note 1) Setting/Display resolution ZSE ISE bar psi mmHg inHg PSE Z I SE3 Fluid that will not corrode stainless steel 630 and 304 12 to 24 VDC, Ripple (p-p

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K J K T T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Table of Contents

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.

Clean Regulator/Fluororesin Type

Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80

3

Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached near one end CKQ = m1 + m2 a12 3 a22 = m1 + m2 4a12 + b2 4a22 + b2 3 12 12 2. Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached at the center of gravity 5.

MK

Full stroke Clamp stroke Made to Order Heat resistant Max. 150C Refer to to p.5.4-1 regarding detailed specifications. 4.1-1 Series MK/MK2 Precautions Precautions Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

Low Profile Guide Type

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1548

C95

Refer to p.0-39 through 0-46 for Safety Instructions, actuator precautions and auto switch precautions. With Non-rotating Rod (Double Acting: Single Rod) Adjustment Warning Operating Precautions Caution q Do not open the cushion valve above the stopper.