Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 E 2 B 2 B 2 B 2 B 74.5 P 1 P 1 (For DIN rail mounting) (7.5) (81) P 1 E 3 P 1 E 3 (When circular connector is mounted) Individual EXH spacer Individual SUP spacer L Dimension n: Stations L n 2 148 137.5 116.3 16 63 3 160.5 150 126.8 17 73.5 4 160.5 150 137.3 11.5 84 5 173 162.5 147.8 12.5 94.5 6 185.5 175 158.3 13.5 105 7 198 187.5 168.8 14.5 115.5 8 210.5 200 179.3 15.5 126 9 223 212.5

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Proposals for Energy Saving

(P .E.)

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Programless controller Step motor (servo 24 VDC)

2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

7.5

For built-in silencers, the 3/5(E) ports are plugged.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1 e !4 !3 w !0 !

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

10

f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

Table of Contents

D E ZPY02U 2 4 6 8 Applicable tube O.D.

Thermo-chiller

Fig. 1 Mounting view 19 Optional Accessories Series HRS100/150 e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating uid. Refer to the Operation Manual for details. Part no.

Table of Contents

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.