Electric Actuator

5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A

NCQ8

Super compact 075(3/4"), 106(1 1/16"), 150(1 1/2"), 200(2"), 250(2 1/2"), 300(3"), 400(4") N-through hole P-port 2 places F Q Z H-thread C-depth 4 places J E D-rod dia. M2 bolt circle For 075, 106 W M1 I dia.

Compact Hydraulic Cylinder

Bore size (mm) NN P S X ZZ Y 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 238 Round Type Hydraulic Cylinder: 3.5 MPa Series CHmM Rod flange style: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4 x FD H1 H2 2 x NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S + Stroke

0.4

19) J P.7 kit (P.25, 41) P.27 T kit (P.67, 79) P.69 L kit (P.81, 93) P.83 Specific Product Precautions P.119 S kit Cylinder Speed Chart Use as a guide for selection.

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

Combination Cylinder

Refer to p.3.1-42. Standard Stroke (mm) Bore size (mm) Standard stroke (mm) 40 50, 63 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes are also available. Contact SMC.

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

45

10 stations Stations n L1 L2 L3 L4 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 137.5 150 175 187.5 200 225 237.5 250 105 121 137 153 169 185 201 217 233 C4 C6 C8 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 SS5X5-45FDStations B(Pitch) P = 16 DIN rail release button 2-One-touch fittings 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4, 6, 8 (P , R port) Applicable tubing O.D.:

AC Servo Motor Driver (Network card type ）

) 0007A120h (50) 2 250 000F4240h (10) 001E8480h (20) ns 1C32h Impossible 3 2 2 4 0025h 0025h (35) 5 250 0003D090h (250) ns 6 222722 0h to Fh 9 0 0h 12 0 0h Note.

Table of Contents

Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.

Table of Contents

) D side 21 B B B B Manual override (Non-locking) n A A A B B B A A A A 3 1 2 2 P = 51 (Pitch) 1 3 6 [2] n Stations R 1 1/2 250 105.5 Stations 176.5 D side 209 AMC810-14 Exhaust cleaner (Option) 250 135 D side mounting 125 U side External pilot port 194 135 Rc 1/8 125 194 X PE PE 4-Rc 1/8 (PE port) 81 U side mounting P EB 31 50 EA 37 37 61 43 2-Rc 3/4 (P port) n: Stations Stations Formula

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

ZP

P. 29 Bellows Series ZP Common adapter With pad Single unit Attachment Sponge Pad For adsorption of work pieces with bumps P. 30 4, 6 8, 10 15 Single unit S Sponge P. 31 With adapter Heavy-duty Pad 32, 300 340 Heavy-duty (Flat with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50

LEF-OM002xx

[mm/s] 801900 24 to 610 16 to 410 8 to 200 9011000 24 to 500 16 to 340 8 to 170 500 10 to 500 5 to 250 20 to 1000 12 to 500 6 to 250 24 to 1200 16 to 500 8 to 250 Actuator specification 501600 20 to 900 12 to 500 6 to 250 24 to 1200 16 to 500 8 to 250 Driver type LECPA Note2) 601700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 500 8 to 250 Stroke Speed range 701800 20 to 550 12 to 330 6

CM2

across flats B2 CA2 2-FD Mounting hole Rc P Plug with fixed orifice 4-FD Mounting hole CS1 C76 C85 40 Width across flats NA S + Stroke H + Stroke C95 20 to 32 ZZ + 2 x Stroke Z + 2 x Stroke CP95 NCM Built-in One-touch fittings One-touch fitting port size P Spring return One-touch fitting port size P Spring extend NCA D-X 20Data H1 H G FZ FY FX FT FD AL B1 F MM A B2 C2 H2 I B D E K N NN P

0.4

Semistandard Exploded View of Manifold P. 1 P. 3 P. 5 P. 7 P. 11 P. 15 Features Variations Cylinder Speed Chart VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications VQ1000/2000 F kit (D-sub connector) P. 17 VQ1000/2000 P kit (Flat ribbon cable) P. 21 VQ1000/2000 J kit (Flat ribbon cable) P. 25 VQ1000/2000 G kit (Flat

NCQ2/CQ2

P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)