Cylinder with Lock

F 58 psi Chart (6) m 73 psi Chart (7) F 1 Cylinder with Lock Series CNA2 Selection Chart Chart (5) Chart (2) 44 psi P < 58 psi 44 psi P < 58 psi 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 80 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 50 40 30 50 40 30 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Range p. 26 Analog Output p. 26 Functions p. 26 Internal Circuits and Wiring Examples p. 27 Dimensions p. 28 3-Screen Display High-Precision Digital Pressure Switch/ IO-Link Compatible ZSE20B(F)-L/ISE20B-L Series How to Order p. 15 Specifications p. 16 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.

AC Servo Motor Driver (CC-Link Type ）

value. 500 for LESYH16 A Lead 500 500 *5.

Compact 5-Port Solenoid Valve

Box p. 105 Terminal Block Box p. 106 Lead Wire p. 107 EX600 p. 108 EX245 p. 110 EX250 p. 112 EX260 p. 113 EX120 p. 114 Manifold Exploded View [Common Parts] p. 115 Type 10: How to Increase Connector Type Manifolds p. 115 For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10/ Manifold Parts Nos.

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

Table of Contents

Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190

5-Port Solenoid Valve

41 p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53

VFR

263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 L L1 L2 90 Series VFR5000 Manifold Option Parts Assembly Plug-in type, Non plug-in type Interface regulator/P port regulation ARBF5050-00-P-1 (Plug-in type) ARBF5050-00-P-2 (Non plug-in type) Individual SUP spacer VVFS5000-P-04-1 (Plug-in type) VVFS5000-P-04-2 (Non plug-in type) Interface regulator Individual SUP

High-Precision Digital Pressure Switch

IP65 2 outputs ZSE/ISE20B p. 11 IP65 2 outputs ZSE/ISE20C p. 19 Air General fluids Pressure range Pressure range 100 kPa 0 100 kPa 500 kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 2 MPa 5 MPa 101 kPa 101 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 100 kPa 100 kPa 100 kPa 100 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa Withstand pressure 2 MPa

Digital Flow Switches

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

LX

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Secondary Batteries

90-VQ2000-X121 D-sub Connector P.5 P.7 P.7 Plug-in Unit Base Mounted Air Preparation Equipment 3 Port Solenoid Valve Pilot Operated Poppet Type 90-AFF 90-AM 90-AMD 90-IDG 90-SFD 90-AMP 90-VP300/500 P.42 P.43 P.44 P.45 P.46 P.47 Main Line Filter Mist Separator Micro Mist Separator Membrane Air Dryer Clean Air Filter Exhaust Cleaner for Clean Room P.8 3 Port Solenoid Valve Pilot Operated Poppet

5 Port Solenoid Valve Series SV1000/2000/3000/4000

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

e

500 3.0 3.0 3.0 3.0 500 600 600 600 LTF 500 2.5 2.5 2.5 2.5 Tact time (sec) Tact time (sec) Tact time (sec) Tact time (sec) 800 800 800 LC1 600 1000 1000 1000 2.0 2.0 2.0 2.0 800 LC7 1.5 1.5 1.5 1.5 LC8 1000 1.0 1.0 1.0 1.0 LXF 0.5 0.5 0.5 0.5 LXP 0 0 500 1000 0 0 500 1000 0 0 500 1000 0 0 500 1000 LXS Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Note) Tact time may vary depending on

LX

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

4/5 Port Solenoid Valve

port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.