High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

Refrigerated Air Dryers Series IDF/IDU

/Dimensions Terminal block A B C Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage Mass C 45 B 200 V (50 Hz) 200, 220 V (60 Hz) 220 V (50 Hz) 220 to 240 V (60 Hz) IDF-TR4000-5 275 259 240 14 kg IDF55E-30 IDF75E-30 IDU55E-30 IDU75E-30 380, 400, 415 V (50 Hz) 380 to 400, 400 to 415, 415 to 440 V (60 Hz) Threephase Singleturn 200 V (50 Hz) 200, 220 V (60 Hz) IDF-TR4000-

Proposals for Energy Saving

G E T D 7 9 Optional How to Order Pilot Valve Assemblies Pilot valve assemblies/Electrical entry Symbol Electrical entry Symbol Electrical entry 50 SF4 Z B E 1 G GS Manual override Rated voltage Nil Push type 1 100VAC, 50/60Hz B Slotted locking type 2 200VAC, 50/60Hz C Locking type 3110 to 120VAC, 50/60Hz 4220VAC, 50/60Hz 5 24VDC Optional E EZ Indicator light/Surge voltage suppressor 6

24

Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

Magnetically Coupled Rodless Cylinder

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

VFR

T (EA)(P)(EB) 5 1 3 Option 2 position double (B) (A) 4 2 Electrical entry 2 Coil rated voltage E: Grommet terminal D: DIN terminal (EA) (P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 3 (EA) (P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center Option (B) (A) 4

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

D side VQC SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly SQ 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.

2/3 Port Valve

Electrical entry G Grommet Voltage C Conduit 2 200V AC 50/60Hz 1 100V AC 50/60Hz D DIN terminal T Conduit terminal 3 110V AC 50/60Hz Refer to table q for configuration. 4 220V AC 50/60Hz 7 240V AC 50/60Hz 8 48V AC 50/60Hz 9 Other (only AC) Table q Voltage-Electrical Entry-Options Caution Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) Class B G C

Table of Contents

-(N)PF2W5--2 B 120 1.6 23 48.2 60 Wiring Brown (1) DC (+) Main circuit Black (4) OUT 50 60 34 55 White (2) NC/Analog output Blue (3) DC () 4-4.5 2-Port size 6 50 40 Use this sensor by connecting to SMC remote type display unit Series PF2W3.

SY

D side Type 41P Type 42P SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

B 23.5 A 11.0 B 23.5 A 7.0 B A 10.5 (13.0) B Bore size 50 63 80 23.5 19.5 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) The values inside ( ) are for the D-A96/A96V.

NCG/CG1

A B A B A B A B 20 24.5 27 27.5 9 3 6 8 4.5 20.5 15.5 17.5 19.5 16 25 27 29.5 30 9 3 6 8 4.5 20.5 15.5 17.5 19.5 16 32 30.5 33 33.5 10 4 7 9 5.5 21.5 15.5 18.5 20.5 17 40 35 37.5 38 14.5 8.5 11.5 13.5 10 23.5 19 20.5 22.5 19 50 40.5 43 43.5 17 11 14 16 12.5 28.5 22.5 25.5 27.5 24 63 47.5 50 50.5 17 11 14 16 12.5 28.5 22.5 25.5 27.5 24 Operating Range Auto switch model Bore size (mm) 20 25

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

option i Cable type Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 50 50 to to 1200 1200 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) o Actuator cable length [m] !

JIS Standard Hydraulic Cylinder

Refer to page 378 for minimum stroke with auto switch. 32 is for B-series rod size only. CH2 H B B 50 100 CH D2 H B B 50 100 M9BW With Auto Switch With auto switch (built-in magnet) Port and cushion valve positions Refer to page 359.

Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!