Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

CXT

10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder Series

Free-Mounting Cylinder with Air Cushion Series CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Compact Rotary Actuator Series CRQ2

10, 15 20, 30, 40 10, 15, 20, 30, 40 10, 15, 20, 30, 40 Change in angle adjustable range 0 to 100 Change in angle adjustable range 90 to 190 Chart 5.

CY1

(cm) 32 20 80.7 8+Lo 10 15 5+L o 15 45.5 6.5+Lo 6 6.48 3.6+Lo Bore size (mm) 40 Allowable load weight (WA)(kg) 6.

Air Slide Table

MXQ8A-15-15Zm-X2192 5 MXQ8A-5-35Zm-X2192 32 6 40 31 31 4 70 55 52.5 52.5 104.5 130 140 280 10 MXQ8A-10-30Zm-X2192 15 MXQ8A-15-25Zm-X2192 20 MXQ8A-20-20Zm-X2192 5 40 15 8 MXQ8A-5-45Zm-X2192 46 6 59 29 29 4 85 55 57.5 62.5 131.5 145 155 330 10 MXQ8A-10-40Zm-X2192 15 MXQ8A-15-35Zm-X2192 20 MXQ8A-20-30Zm-X2192 25 MXQ8A-25-25Zm-X2192 50 * The first stage stroke adjustment cannot be performed.

Dual Rod Cylinder Series CXSJ/CXS

5 40 11 38 9 40 11 35.5 6.5 44 15 34 5 44 15 36 7 49 11.5 47 9.5 49 11.5 44.5 7 53 15.5 43 5.5 53 15.5 45 7.5 Note 1) 6: D-A90, A96, A93, F9BAL 10: D-A90, A96, A93 Only outward electrical entry (D dimension) is available.

CRQ2

, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

CHKD/CHKG

1.5 7 19 53 128 83.5 81 1/4 22 10 15 24 12 84 108 32 35 M24 x 1.5 8 24 62 146 100.5 97 1/4 25.5 10 18 30 15 97 127 42 45 M30 x 1.5 9 30 78 175 121.5 117 3/8 30 15 20.5 35 17.5 113 148 57 60 M39 x 1.5 14 41 98 221 147 142 3/8 36 15 23 40 20 136 176 72 75 M48 x 1.5 21 50 118 254 271 Auto Switch Mounting CHKD Series Refer to pages 431 to 490 for detailed specifications.

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2, 4, 6, 8 10 + 55 (n 2) /2 n = 2, 4, 6, 8 20 + 55 (n 2) /2 n = 2, 4, 6, 8 1 15 25 2 (Different surfaces, Same surface) 20 15 25 D-A59W n 20 + 55 (n 2) /2 n = 2, 4, 6, 8 15 + 55 (n 2) /2 n = 2, 4, 6, 8 25 + 55 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 15 10 15 D-Y59m D-Y7P D-Y7mW D-Z7m D-Z80 n 15 + 40 (n 2) /2 n = 2, 4, 6, 8 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15

Table of Contents

x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l

24

2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

High Vacuum Angle Valve

(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CE

D-F9N, F9P, F9B 11.9 16 78.2 85 D-F9NV, F9PV, F9BV 10.9 15 79.2 86 D-F9NW, F9PW, F9BW 11.9 16 78.2 85 D-F9NWV, F9PWV, F9BWV Switch operating position (OFF) 10.9 15 79.2 86 D-F9BA 11.9 16 Note) This varies according to the operating environment, and cannot be guaranteed.

Basic type / Direct mount type Series CY3B/CY3R

of numbers 15 through 19.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 28.5 32 Z ZZ G (NN 1) x H 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35 50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10

MXS

15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

58

with rod boot on both sides) ZZ + 2 x strokes (mm) Bore size (mm) 125 140 160 Stroke range (mm) B A AL B C D E F FD FT FX FY FZ J W V KA M G K Up to 1000 15 50 47 143 145 115 32 71 43 19 14 190 100 230 M14 x 1.5 17 27 13 15 15 Up to 1000 15 50 47 157 160 128 32 71 43 19 20 212 112 255 M14 x 1.5 17 27 13 15 15 Up to 1200 15 56 53 177 180 144 38 78.5 42 19 20 236 118 275 M16 x 1.5 20 34 15