Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

MY1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Ceiling mounting m2 Horizontal mounting m1 Wall mounting m3 Vertical mounting m4 Note) M3 Static load (m) M1 m4 x g x Z m1 x g x X m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Battery-less

D-G

Proposals for Energy Saving

50/60Hz 220VAC, 50/60Hz 24VDC 12VDC 240VAC, 50/60Hz Other (32A) 1 1/4 (40A) 1 1/2 2 (50A) 2 4 5 6 5 7 9 Optional How to Order Pilot Valve Assemblies 00 VT3113 G 1 Electrical entry Rated coil voltage 1 100VAC, 50/60Hz 200VAC, 50/60Hz 110VAC, 50/60Hz 220VAC, 50/60Hz 24VDC 12VDC 240VAC, 50/60Hz Other 1 2 3 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light

VFS

Body (Pilot exhaust) 20: Individual EXH Electrical entry T: Conduit terminal D-Y: DIN terminal G: Grommet E: Grommet terminal 30: Common EXH Coil rated voltage 3 2 1 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) Manifold only 4 220 VAC (50/60 Hz) Pilot type 6 5 24 VDC 12 VDC Internal pilot Nil External pilot R 7 240 VAC (50/60 Hz) 9 Other Option.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VQ4 Electrical entry Body (Pilot exhaust) T: Conduit terminal D, Y: DIN terminal G: Grommet E: Grommet terminal 20: Individual EXH VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

ZP

Model Weight (g) Pad dia.

Electric Slide Tables

Origin Note 2) [Stroke end] (1.5) 65 K Cable length 280 11.5 86 (L) Stroke A-A 2 sections (30, 50, 75 st) 3 sections (100 st) 15.5 40 4H9 (+0.030 0 ) depth 5 4H9 (+0.030 0 ) depth 5 5 G x M6 x 1 x 12 G x 5.3 A 28 G x 9.5 A 25.2 5 J 2 x M6 x 1 x 12 Top mounting not available 9 F (G/21) x J With lock Connector Servo motor Step motor Lock cable (3.5) Motor cable (2 x 5) Motor cable 20 20

Made to Order

M8 x 1.25 28.5 7 41 9 25 6 17 75,100 40.5 88.5 B + Stroke MH + Stroke A + 2 x (Stroke) 5 to 50 40 (50) 88 (98) 40 M10 x 1.25 27 46 7 41 10 25 6 19 32 to 100 75,100 50 98 10 to 50 100.5 (110.5) 40.5 (50.5) MI MM 50 M14 x 1.5 31 57 8 52 13 35 8 24 75,100 110.5 50.5 10 to 50 102 (112) 42 (52) 63 M14 x 1.5 31 68 8 52 13 35 10 24 G 75,100 112 52 10 to 50 125 (135) 51 (61) 80 MA ML MK M20 x 1.5

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

50/60Hz] Y With connector DIN terminal (DIN 43650C) YO Without connector Note) When replacing the pilot valve assembly alone, SY114 (G, H, L, and M) cannot be replaced with SY115 (DIN terminal), or vice versa.

Modular F.R.L. Unit

60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F G Port size Port size Body size Symbol Port size Body size Symbol Port size 25 30 40 50 60 20 25 30 40 50 60 02 1/4 01 1/8 03 3/8 02 1/4 04 1/2 03 3/8 06 3/4 04 1/2 10 1 06 3/4 Option Note 1) 10 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Best Pneumatics Vol. 14

60 20 25 30 40 50 60 X430 X440 Low temperature High temperature Thread type Thread type Rc NPT G Rc NPT G Nil N F Nil N F Port size Port size Body size Port size Body size Symbol Port size Symbol 25 30 40 50 60 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option (1) 1 Symbol Nil B G (2) Applicable model AR25 to 60 AR25 to 60 AR25 to 40 Option

SY

(Connector, socket x 2pcs. only) 2 200VAC 50/60Hz Lead wire length Note 2) "R" and U" specifications are only available for DC. 110VAC 50/60Hz [115VAC 50/60Hz] 3 300mm Nil Electrical entry 4 220VAC 50/60Hz [230VAC 50/60Hz] 6 600mm G Grommet (lead wire length: 300mm) H Grommet (lead wire length: 600mm) 1000mm 10 15 20 25 30 50 1500mm 2000mm 2500mm 3000mm 5000mm L With lead wire L type plug

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

Table of Contents

Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz Power consumption (W) 0.46 0.52 Current (A) Compact size and lightweight

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

2/3 Port Valve

Electrical entry G Grommet Voltage C Conduit 2 200V AC 50/60Hz 1 100V AC 50/60Hz D DIN terminal T Conduit terminal 3 110V AC 50/60Hz Refer to table q for configuration. 4 220V AC 50/60Hz 7 240V AC 50/60Hz 8 48V AC 50/60Hz 9 Other (only AC) Table q Voltage-Electrical Entry-Options Caution Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) Class B G C

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1