(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Secondary Batteries

10 Applicable Products Applicable Products Material restriction: 90series Material restriction + Lub-retainer: 91series Material restriction + Lub-retainer + Heavy-duty scraper: 91--XC4 series Material restriction + Vacuum port for vacuum suction: 92series Air Preparation Equipment : Available as standard Remarks Description Series 90With fittings for purge air discharge IDG50L to 100L

Table of Contents

less Switch Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

less Switch Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l

Modular F.R.L. Unit

Operating compressor: 0.75KW (100L/min (ANR)) or more Multiply the following values by the number of auto drains to find the capacity of the compressors you will need when using 2 or more auto drains. When using 2 auto drains, 1.5kW (200L/min (ANR)) of the compressor capacity is required.

Modular F.R.L. Unit

Operating compressor: 0.75kW [100L/min 0.4 0.4 0.3 0.3 0.2 0.2 (ANR)] or more.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

48

LEL25MT-100l-l LEL25MT-200l-l LEL25MT-300l-l LEL25MT-400l-l LEL25MT-500l-l LEL25MT-600l-l LEL25MT-700l-l LEL25MT-800l-l LEL25MT-900l-l LEL25MT-1000l-l LEL25LT-100l-l LEL25LT-200l-l LEL25LT-300l-l LEL25LT-400l-l LEL25LT-500l-l LEL25LT-600l-l LEL25LT-700l-l LEL25LT-800l-l LEL25LT-900l-l LEL25LT-1000l-l With motor cover 272.5 372.5 472.5 572.5 672.5 772.5 872.5 972.5 1072.5 1172.5 292.5 392.5

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75