VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Non-locking push type M5 x 0.8 VT For N.O.

Vacuum System Peripherals:

ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate X for the position of ejector/valve, etc.

Electric Actuator

Cable type Note 1) Stroke [mm] 100 Nil Without cable 100 S R to Standard cable to 800 Robotic cable (Flexible cable) 800 Note 1) The motor and encoder cables are included. (The lock cable is included when the motor with lock option is selected.)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

800 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 600 600 1000 1000 X m Me LEM 400 400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH

CQS

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 15 Note) 25 Note) 10 10 5 2 10 Note) 25 Note) RQ 5 1 15 Note) Note) Please consult with SMC for shorter stroke length than indicated in the table.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

A

Outside Local Area: (800) 258-9200 !

KJ

Note) D1: Max. diameter D2 Connection thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Female Elbow: KQ2LF Applicable tubing O.D.

LEC-OM071xx

Range Setting Enabled Section Pn402 2 Forward Torque Limit 0 to 800 1% 800 Immediately Setup 4.6.1 Pn403 2 Reverse Torque Limit 0 to 800 1% 800 Immediately Setup 2 Forward External Torque Limit Pn404 0 to 800 1% 100 Immediately Setup 4.6.2 2 Reverse External Torque Limit Pn405 0 to 800 1% 100 Immediately Setup Pn406 2 Emergency Stop Torque 0 to 800 1% 800 Immediately Setup 4.3.2 2 Speed

CXS

Compact Type: CXSJ Vertical Mounting l l Mounting orientation m m Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Max. speed (mm/s) Up to 200 Up to 400 Up to 600 Up to 800 All strokes Stroke (mm) 6 10 15 Selection graph (1) (2) (3) (4) 20 25 32 Horizontal Mounting

VZS

How to confirm the new and old valves interface Valve interface With gasket groove Without flat surface groove New Old Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Screw, gasket assembly part no.

ARM10/11

AV AU AF Flow rate (/min (ANR)) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR (Manifold side) Outlet pressure (MPa) VEX Component Parts AMR No.

ARM10/11

AV AU AF Flow rate (/min (ANR)) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR (Manifold side) Outlet pressure (MPa) VEX Component Parts AMR No.

70pvpump

800 Refer to Best Pneumatics Vol. 14 for further details.

CE

Rod side flange style Cable length 20 mm Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 3 pcs.

SZ3000

SZ3 60(R) X90 U side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Entry is the same as standard products. Specifications and performance are the same as standard products.

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimal dead space The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

ITV

Count AF Supply pressure: 1.0 MPa Pressure Characteristics Flow Characteristics Set pressure: 0.45 MPa AR 1000 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 900 kPa 900 Output deviation factor (% F .S.) 800 kPa IR 800 0.5 700 kPa Set pressure (kPa) 700 600 kPa