High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Membrane Air Dryer

D-DN

AIR CYLINDER

Parts list * is different from standard type (C(D)S2) No.

XLF Series

D D D Valve seal (maintenance part) 4 Body (material: A6063) C C C C E E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3

ChemicalThermo-con

D/MS3102A20-15S Connect the DC cable connector of the heat exchanger. 6 Contact b for upper/lower temp. limit alarm (closed when alarm occurs) A F Alarm output connector D-sub 9 pin (pin type) 7-9 Unused G E B 6. Communication connector: D-sub 9 pin OMRON Corp. XM2D-0901 or equivalent, holding screw M2.6 Connection cable: With shielding 22AWG or more Pin No.

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

l

BBA1: D-A5/A6/F5/J5 D-F5BAL switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, BBA1 screw is attached.

Air cylinder

Doc. no.CS2*-OM0001M D PRODUCT NAME Air cylinder MODEL / Series / Product Number CS2*125320-** Contents 1. Safety Instructions P.2 2.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

XLG Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

HRX-OM-R039

Fig. 8.4-2 Cooling capacity(HRSE018-A-10) 8.4.3 HRSE012-A-20/23-(T) 1600 1600 Ambient Ambient Temperature Temperature 1400 1400 25 35 40 25 35 40 1200 1200 Cooling capacity[W] Cooling capacity[W] 1000 1000 800 800 600 600 400 400 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 60Hz 50Hz The cooling capacity will be reduced by 100W when

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

Table of Contents

D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18

Solid State Auto Switches

1599 2-color indication Grommet Band with diagnostic D-G59F 1600 D-F79F Rail Grommet 1601 output With timer Water resistant 2-color indication Magnetic field resistance D-F59F Grommet Tie-rod 1602 D-M9PA/M9NA/M9BA Direct Grommet 1603 D-M9PAV/M9NAV/M9BAV D-Y7BA 1604 D-H7BA 1605 Band Grommet D-G5BA 1606 D-F7BA D-F7BAV Rail Grommet 1607 D-F5BA Grommet 1608 Tie-rod Hygienic Direct Grommet D-F6N

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto Switch Mounting Height [mm] D-F5m D-F5mW D-J59 D-J59W D-F59F D-F5BAL D-F5NTL Auto switch model D-Y59m D-Y7P D-Y7mW D-Y7BAL D-Z7m D-Z80 D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-Y69m D-Y7PV D-Y7mWV D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P4DW Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 30.5 23 32.5 25 35 24.5 25.5 23 26.5 23 67 27.5

42

U D U D Thread type Nil Rc F G N NPT T NPTF Refer to page 534 (Grommet type) for wiring specifications.