High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

HRX-OM-R039

Fig. 8.4-2 Cooling capacity(HRSE018-A-10) 8.4.3 HRSE012-A-20/23-(T) 1600 1600 Ambient Ambient Temperature Temperature 1400 1400 25 35 40 25 35 40 1200 1200 Cooling capacity[W] Cooling capacity[W] 1000 1000 800 800 600 600 400 400 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 60Hz 50Hz The cooling capacity will be reduced by 100W when

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

Table of Contents

D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18

Solid State Auto Switches

1599 2-color indication Grommet Band with diagnostic D-G59F 1600 D-F79F Rail Grommet 1601 output With timer Water resistant 2-color indication Magnetic field resistance D-F59F Grommet Tie-rod 1602 D-M9PA/M9NA/M9BA Direct Grommet 1603 D-M9PAV/M9NAV/M9BAV D-Y7BA 1604 D-H7BA 1605 Band Grommet D-G5BA 1606 D-F7BA D-F7BAV Rail Grommet 1607 D-F5BA Grommet 1608 Tie-rod Hygienic Direct Grommet D-F6N

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto Switch Mounting Height [mm] D-F5m D-F5mW D-J59 D-J59W D-F59F D-F5BAL D-F5NTL Auto switch model D-Y59m D-Y7P D-Y7mW D-Y7BAL D-Z7m D-Z80 D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-Y69m D-Y7PV D-Y7mWV D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P4DW Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 30.5 23 32.5 25 35 24.5 25.5 23 26.5 23 67 27.5

42

U D U D Thread type Nil Rc F G N NPT T NPTF Refer to page 534 (Grommet type) for wiring specifications.

C95

0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D-F5 D-J5 D-F5W D-J59W D-F5BA D-F59F With 2 pcs.

C95

0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM

Rotary Table/

D. (mm) I. D.

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

Process Valve Series VNA

23 Q 5 D VO307 00 Q CE compliant CE compliant 5 D SF4 5 D 23 Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only VO301 00 With surge voltage suppressor Manual override Coil rated voltage Coil rated voltage None Surge voltage suppressor (Except DZ, DL) Nil Non-locking push type Non-locking push type A (projecting) Nil 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50

A_HEC-OM-K001

I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.

Low Friction Cylinders Series MQ

D Note) Be sure to use a flat washer for the A type mounting. b) Mounting type B (when using the cylinder tube threads) E t E t REA REB Compatible Mounting Bolt Dimensions Mounting type A Mounting type B REC Model Mounting bolt size E (mm) C (mm) D: Bolt length (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB30-D MQQTB40-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB30

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

CC-LINK System PROFIBUS-DP (COM) DI unit (For input) M12 8 number of inputs U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D EX323 -S001 EX123 -SMB1 EX124 -SMB1 EX123 -STA1 EX123 -SSH1 EX123 -SUW1 EX124 -SAB1 EX123 -SUH1 EX123 -SSL1 EX123 -SSL2 EX123 -SFU1 EX124 -SDN1 EX124 -SCS1 EX124 -SCS2 EX124 -SJN1 EX124 -SMJ1 EX240-SDN2 EX240-SPR1 EX240-IE1 Dedicated output model For

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2