ZP

D E F E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A

1

(B) (D) (B) (D) (B) (D) (B) (D) (B) (D) (B) (D) (B) CA2 Double acting, Single rod Air cylinder CP95 CA2W Double acting, Double rod (C) (C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

ZP

2.5 Deep H: M6 x 1 H: M8 x 1 Y Model A B C E F G I C E F G I D ZPT25D 25 28 20 3 25 25 51 8 3.5 30 15 46 12 10 Elliptic Model a ZPT2004U 4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y Dimensions of D, E, G are the same.

Table of Contents

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

AC Servo Motor Driver (Pulse input type/Positioning type ）

750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

Air Cylinder Series CM2

Dd9 L m t d Part no. l H Material: Carbon steel CD-S02 CD-S03 0.040 0.076 8 19.5 7.6 24.5 1.6 0.9 Type C 8 for axis B 0.040 0.076 10 29 9.6 34 1.35 1.15 Type C 10 for axis Note) Retaining rings are included. D C d C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

ZP

D C Width across flats 10 Model A B C D Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

The silencer plugs directly into the One-touch fittings of the manifold R (exhaust) port. d D A For Series SY9000 (12) Model AN300-KM12 Effective area 41 mm2 A 25 B 70 C 98 L DIN Rail Dimensions/Mass for SY9000 Dimensions 4 11 VZ1000 Refer to L dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 44.5

Table of Contents

90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

LX

(A contact) 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 2mm 5mm C Note 1) D N.C. (B contact) Stroke N.C.

JIS Standard Hydraulic Cylinder

Series Dimensions Basic type: CH2EWB, CH2FWB 2 x Rc P GA J M GA R MM MM D E D E Width across flats G Width across flats G C MA MA B F T Air release A K K F T NA NA A S + Stroke H + Stroke H ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) B C F R J M T GA NA P S 32 25 to 800 38 58 M10 x 1.25 32 11 3/8 158 16 39 37 11 40 25 to 800 65 45 32 M10 x 1.25 11 3/8 12 158 42 36 11 50 25 to 800

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

LX

(A contact) 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 2mm 5mm C Note 1) D N.C. (B contact) Stroke N.C.

Electric Actuator

T2 V M W Type A mounting bracket Type B mounting bracket 25, 32 YA-03 LEY-U025 YB-03 Joint E 2 x O counterbore 2 x D through Joint T1 B J H With locking adhesive d2 Material: Stainless steel d1 [mm] Applicable size 25, 32 12 B D E J M O Part no. L K UT YB-03 Material: Stainless steel UA C 7 25 9 34 11.5 depth 7.5 [mm] Weight oz. (g) Weight oz.

Table of Contents

D U Applicable Plug Assembly (D-sub connector cable assembly) (Option) Component parts Plug MIL standard D-sub connector D-sub connector Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Cable length 1.5 m 3 m 5 m 8 m Assembly part no. VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7.

Electric Actuator/Slider Type

5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

5-Port Solenoid Valve

C C q: SY30M-56-4A w: SY50M-56-4A e: SY70M-56-4A D Individual EXH (SUP) spacer assembly D Mounting onto a manifold follows the order explained above.

V100

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases