ATX-OM-F003E

426 HAW75-20 2112 1538 366 150 1703 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW110-30 1724 950 500 72 1210 365 267 303 356 200 Note 1 70 Note 1 195 8.0 18 3 1 1 1/4 395 459 Note 1) HAW110-30 is 220 HAW Series 6 4 1) Outer dimensions ATX-OM-F003E Water Cooled Aftercooler 4.

Air Cylinder NCM Series Stainless Steel Cylinders

It.o0 5.06 5.06 150 t]rn .375 .r-24 o.aa .471 .749 o.44 1.56 1.00 0.38 0.63 1.25 1.25 0.25 ,r-14 '|.12 1,8t 0.91 4.OO 4al (E slrc" Series NCM Stainless SteelRod Low SPeed Air Cvlinder Stain]esJ Stcel Cylinder Stainless Steel Rod Specifications .

Shock Absorbers and Rate Controls

51 1.25 .563 .3t5 ADASI O 1.06 .31 8.87 9.81 .251 1.25 .500 t ( -)0J .37 5 ADAS I 5 1.06 I0,87 t.t5 -f0t .37 5 ADA52O r.06 .31 12.87 13.81 .251 1.25 .500 .25 .563 .37 5 ADA525 1.06 .3i 14.87 15.81 .251 1.25 .500 :15 .563 .375 All d mensions in inches. I W"at* e*mWr>Ns 4glv. ADASOOM Series ADA505M --+ ADA525M Metric L + Stroke 0o) Itllx.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

1 P Equation L1=19n+11 L2=19n+23 n: Stations (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375

Refrigerated Air Dryer

Applicable dryer Weight (g) A B AMH A IDF-FL209 IDF-FL202 IDF-FL203 IDF-FL204 IDF-FL205 IDF-FL206 IDF-FL207 IDF-FL208 IDF-FL213 IDF-FL214 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 IDFA22E IDFA37E IDFA55E IDFA75E 220 310 375 340 375 440 420 550 720 610 240 35 45 55 70 75 120 100 140 175 190 (20) (20) AME 195 265 B AMF 370 315 365 400 560 ZFC SF (10) SFD (IDF-FL209) (IDF-FL202 to 208, 213

Refrigerated Air Dryer

Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

120 175 Male thread Rod end male thread 73 82 92 101 110 119 16 17 1 2 4 8 17 32 32 49 116 Nut MU 109 122 136 150 164 178 191 205 219 233 20 7 0.7 1.3 2 3 5 13 25 45 96 With boss in head side 144 161 178 195 211 228 245 262 278 295 25 D7 0 1 2 3 3 9 18 31 56 With rubber bumper 190 211 232 252 273 294 315 335 587 356 377 482 32 12 12 21 21 Built-in One-touch fittings -X 282 305 328 351 375

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Manifold Specifications

8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375

Manifold Specifications

211 12.5 9 260.5 250 230 15.5 10 273 262.5 249 12 Stations L1 L2 L3 L4 Stations L1 L2 L3 L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375

CQ2

1.5 53 3 53 6 120 12 26 Male thread Rod end male thread 73 82 92 101 110 119 16 17 116 1 32 2 32 4 49 8 17 Nut 109 122 136 150 164 178 191 205 219 233 20 7 96 0.7 13 1.3 25 2 45 3 5 Rear boss mount 144 161 178 195 211 228 245 262 278 295 25 7 56 0 9 1 18 2 31 3 3 With rubber bumper 190 211 232 252 273 294 315 335 356 377 482 587 32 12 21 21 12 With One-touch fitting 282 305 328 351 375

Refrigerated Air Dryer

Applicable dryer Weight (g) A B IDF-FL200 IDF-FL201 IDF-FL202 IDF-FL203 IDF-FL204 IDF-FL205 20 30 45 55 70 75 150 200 IDF1E, 2E IDF3E IDF4E IDF6E, IDU3E IDF8E, IDU4E IDF11E, IDU6E 220 310 375 340 375 195 (IDF-FL200, 201) (IDF-FL202, 203, 204, 205) 265 12 14 Accessory (Option) Bypass Piping Set/Dimensions IDF1E, 2E, 3E For NPT For Rc (E) (E) Air outlet Air inlet Air outlet Air inlet Port size

1

Trunnion position for -XC14A Trunnion position for -XC14B CP95 For -XC14A For -XC14B For -XC14 Reference Standard (Center trunnion) Bore size (mm) Minimum Maximum Minimum stroke NCM 125 140 160 25 30 35 364 + 0.5 stroke 404 + 0.5 stroke 463 + 0.5 stroke 352.5 + Stroke 390 + Stroke 446.5 + Stroke 353 + Stroke 390.5 + Stroke 447 + Stroke 375.5 418 479.5 375 417.5 479 NCA Series CLS DZ + 1/2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

120 175 Male thread Rod end male thread 73 82 92 101 110 119 16 17 1 2 4 8 17 32 32 49 116 Nut MU 109 122 136 150 164 178 191 205 219 233 20 7 0.7 1.3 2 3 5 13 25 45 96 With boss in head side 144 161 178 195 211 228 245 262 278 295 25 D7 0 1 2 3 3 9 18 31 56 With rubber bumper 190 211 232 252 273 294 315 335 587 356 377 482 32 12 12 21 21 Built-in One-touch fittings -X 282 305 328 351 375

MNB

150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375

Magnet: Built-in, Mounting: Front Flange, Bore Size: Ø25, Piping: Rc, Stroke: 450mm, Rod Boot: None, Auto Switch: H7C--Solid State, Gen. Purpose, 2 Wire, Connector, Lead Wire or Prewired Connector: 5m, Number: 1 pc.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

LEH_C

MHZ-A4002 MHZ-A4002-1 MHZ-A4002-2 MHZ-A4002-3 13 - 2.2 LEHZJ () 2.2.1 LEHZJ10 LEHZJ16 LEHZJ20 LEHZJ25 /(mm) 4 6 10 14 (mm) 251/73 249/77 246/53 243/48 614 (40100) 1640 (40100) (N) 1) 3) 36 (50100) 48 (50100) 1128 (40100) /(mm/s) 2) 3) 580 /550 5100 /550 () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 / (m/sec 2) 7) 150 / 30 (c.p.m.) 60 () 540 (%RH) 90 () 170 230 440 610 (g) 140 200 375

LEJ-OM002xx

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 Electronic gear denominator *3 PA07 1 300 200 100 375 250 125 675 525 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) 0 Rotation direction selection PA14 0 1 (+Counter motors side) (+Counter motors side) Adaptive tuning