High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Plate Cylinder

Type C retaining rings for axis are attached.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

e

With guide l = C/H/HT Combining with another guide Note) Direct mount of load Note) Friction coefficient for combining with another guide is 0.1 or less. 1092 Model Selection Guide Tact Time Heavy load specifications (2.45 m/s2) Standard load specifications (4.90 m/s2) Medium load specifications (9.80 m/s2) Light load specifications (19.60 m/s2) 4.0 4.0 4.0 4.0 300 mm/s 300 mm/s 300 mm/s

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

2

valve N.C. auto-drain N.O. auto-drain Drain guide 50 60 170 50 75 240 100 100 300 150 Symbol Note Nil C D J Nil H L S 20 15 40 60 300 300 75 500 500 110 Auto-drains listed on page 95 are attached.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Air Slide Table Series MXS

MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) D-X Individual -X 57 Series MXS Dimensions: MXS6 Basic style 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 6 J I Max. 10.5 (With stroke adjuster at retraction

Basic type / Direct mount type Series CY3B/CY3R

250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single

REA/REB

300 3.7 0.25 Model Stroke (mm) 32 400 3.1 0.40 RHC REAR10 20 Wear ring C Body 40 400 2.8 0.62 REAR15 25 Note 1) Avoid operations where rotational torque (moment) is applied.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

C in the case of 15.

Sine Rodless Cylinder Series REA/REB

Non-rotating accuracy Maximum allowable moment MD (Nm) (2) Allowable stroke (mm) Non-rotating accuracy ( ) Bore size (mm) 10 100 6.0 0.05 15 200 4.5 0.15 20 300 3.7 0.20 Switch rail 25 300 3.7 0.25 400 Cushion Stroke 32 400 3.1 0.40 Wear ring C Body 40 2.8 0.62 Model Stroke (mm) REAR10 20 Note 1) Avoid operations where rotational torque (moment) is applied.

Auto Switch Guide

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

Mechanically Jointed Rodless Cylinders

400 300 200 100 MY3A max.