Table of Contents

C D E F Dimensions Part no.

1

34 34 NCM 63 160 200 7 89 42 188 42 170 42 42 Series MXH Series MGC/MLGC Series MGG Table material: Aluminum Front plate material: Steel Front plate material: Steel NCA 2-D A B 2-C 2-E DMounting side Connecting port side Mounting side Connecting port side -X 20Data D LX B C D A 4-C2 Dimensional Range Not Possible to Machine Additionally E A B C D Bore size (mm) 20 25 32 40 50 63 80 100 Dimensional

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D D O U B L E C L E V I S T Y P E NCJ2D_-_T ZZ 50 100 150 200 300 400 500 3.73 3.94 4.23 4.71 3.91 4.12 4.41 4.89 5.31 5.92 6.69 *Clevis Pin Included S Z D GA NB U Bore Size A B C CD CX MM NA R 50 100 150 200 300 400 500 50 100 150 200 300 400 500 H 0.157 0.31 0.93 0.31 10 (3/8) 0.60 0.47 0.55 0.187

2/3 Port Valve

Oil Air Water Vacuum (V, M) Power (C) Steam (S, Q) Oil (D, N) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC (Std.) (Std.) (Std.) VX21 (X, E, N, P) 80 60 99 120 183 60 60 60 AC DC Max. DC 60 40 40 40 40 AC Min. AC, DC (1) (2) 10 20 1 10 5 VX22 DC Note 1) Dew point 10C or less Note 2) 50 cST or less Note 3) "X", "E", "N", "P" etc. in the parenthesis are option symbols.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

E EZ Grommet terminal 7 240 VAC, 50/60 Hz Locking type C (Lever) 1 VFR44 C 9 Other Conduit terminal T TZ VFR44 Option Option D DZ DIN terminal VFR40, VFR41: Pilot valve assembly is all plug-in (F).

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R W Z AC10A AC25C AC60 AC40A AC40C AC20A Float type auto drain (N.C.)

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

5 Port Solenoid Valve Series SV1000/2000/3000/4000

10 to 50 (No freezing.

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

Air Slide Table

Shock Absorber/RJ [mm] Model A B C D E F Applicable part no.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With connector cable Note 1) W 50 60 4 220 VAC Hz [230 VAC Hz] 50 60 50 60 For type W, DC voltage is only available.

MGP

FA C + Stroke E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50st Over 50st B C DA DB FA FB G GA GB GC H HA J K L 25, 50st Over 50st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RR RB RA QB QA

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Part no.

•

/>B ' C . 0 E . F.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

NCM

(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.