Table of Contents

D E F E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

HRS100/150

V : 150 [L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] HRS 100/150 HRS 100/150 HRSH 090 HRSH Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860

15

B D x 150 (= E) 60 15 Note) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 E 2 B 2 B 2 B 2 B 74.5 P 1 P 1 (For DIN rail mounting) (7.5) (81) P 1 E 3 P 1 E 3 (When circular connector is mounted) Individual EXH spacer Individual SUP spacer L Dimension n: Stations L n 2 148 137.5 116.3 16 63 3 160.5 150 126.8 17 73.5 4 160.5 150 137.3 11.5 84 5 173 162.5 147.8 12.5 94.5 6 185.5 175 158.3 13.5 105 7 198 187.5 168.8 14.5 115.5 8 210.5 200 179.3 15.5 126 9 223 212.5

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

CV/MVGQ

CVS1K40-PS CVS1K50-PS CVS1K63-PS Contents Set of nos. above @7, @8, #0, #1, #3, #6 CE1 CE2 Basic Style: CVS1K ML2B 157.8 212.4 C J G5-S CV 59 28 HX MVGQ Width across flats KA 69.4 Width across flats B1 16.5 4-J 12 CC H1 24.5 20 MM W E D KA e RB Connecting port A 2-Rc 1/4 34.5 AL J l f 8 h + l ZZ + l + Stroke C B H A F N 73.6 S + Stroke M ZZ + Stroke D-X Bore size (mm) Stroke range (mm) A

CV/MVGQ

CVS1K40-PS CVS1K50-PS CVS1K63-PS Contents Set of nos. above @7, @8, #0, #1, #3, #6 CE1 CE2 Basic Style: CVS1K ML2B 157.8 212.4 C J G5-S CV 59 28 HX MVGQ Width across flats KA 69.4 Width across flats B1 16.5 4-J 12 CC H1 24.5 20 MM W E D KA e RB Connecting port A 2-Rc 1/4 34.5 AL J l f 8 h + l ZZ + l + Stroke C B H A F N 73.6 S + Stroke M ZZ + Stroke D-X Bore size (mm) Stroke range (mm) A

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

7.5

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

Table of Contents

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

CL

D C B H d Tube I.D.

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

Table of Contents

C D E F Dimensions Part no.

AC Servo Motor Driver (CC-Link Type ）

station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure