CV/MVGQ

CVS1K40-PS CVS1K50-PS CVS1K63-PS Contents Set of nos. above @7, @8, #0, #1, #3, #6 CE1 CE2 Basic Style: CVS1K ML2B 157.8 212.4 C J G5-S CV 59 28 HX MVGQ Width across flats KA 69.4 Width across flats B1 16.5 4-J 12 CC H1 24.5 20 MM W E D KA e RB Connecting port A 2-Rc 1/4 34.5 AL J l f 8 h + l ZZ + l + Stroke C B H A F N 73.6 S + Stroke M ZZ + Stroke D-X Bore size (mm) Stroke range (mm) A

CV/MVGQ

CVS1K40-PS CVS1K50-PS CVS1K63-PS Contents Set of nos. above @7, @8, #0, #1, #3, #6 CE1 CE2 Basic Style: CVS1K ML2B 157.8 212.4 C J G5-S CV 59 28 HX MVGQ Width across flats KA 69.4 Width across flats B1 16.5 4-J 12 CC H1 24.5 20 MM W E D KA e RB Connecting port A 2-Rc 1/4 34.5 AL J l f 8 h + l ZZ + l + Stroke C B H A F N 73.6 S + Stroke M ZZ + Stroke D-X Bore size (mm) Stroke range (mm) A

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

2 Phase Stepper Motor/Without Motor Brake Series LXP

+0.030 0 depth 6 E Note) A contact protection circuit is required when connecting a brake. 12 6 Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 D E 3.5 2 5 1 34 44 52 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

NCA1

AA KK EA MM BA B R E/2 4-NT WF G J TN Depth ND E XT SN + Stroke A ZB + Stroke EA E/2 E DD D Bore size (in) MM KK NT TN WF XT Y LF P SN ZB C BA B AA ND A J G EE R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 2 1/4-28 9/16 3/8 1 1/8 1 1/8 2.02 9/32 3/4 1.1 1.26 3/8 1.43 2.36 200 (2") 5/8 7/16-20 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 1/4 2 1/2 5/16-24

NCA1

NCM LF + Stroke WF C R 4-DD J G 2-EE (NPTF) NCA SB Screw D(4) Hole EA MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8 7/16-20 3/4

CATALOG VC10

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Vacuum System Peripherals:

(for special specifications) n r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5 16.5 5 173 162.5 138 17.5 6 173 162.5 148.5 12.5 7 185.5 175 159 13.5 8 198 187.5 169.5 14.5 9 210.5 200 180 15.5 10 223 212.5 190.5 16.5 11 235.5 225 201 17.5 12

AC Servo Motor Driver (CC-Link Type ）

station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

0.4

D E F A B F ' %%( '()* + , 1 ) " . # / " . # / " C !

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT TF3040C-TX TF3060C-TX [Unit: mm] 3-M6 8-M M4 M4 3-M6 M6 Approx.17 22 22 G 2 F 1 E 2 IN D 1 D 1 D 1 L C 2 K 2 B 5 J A 5 H 5 Model Dimensions [mm] A B C D E F G H J K L M R3.25 length 8 TF3040C-TX 438 412 390 100 175 160 145 200 Approx.190 180 Approx.91.5 (M6) TF3060C-TX 12 35 12.

0.4

5 1 (P) 3 (R2) 3 position: SQ1 40 3 4 5 3 position: SQ1 41 3 4 5 r e e q r q e w e w SQ1441 SQ1541 SQ1340 SQ1440 SQ1540 SQ1341 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) Dual 3 port valve: SQ1 41 A B C Component Parts r e e q w w No.