MG

kinds of bearing (Slide bearing, Ball bushing bearing) CY P . 8-20-2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com : Common stroke for MGQ and MGP : For MGP CX DSeries MGG Bore size (mm) Standard stroke (mm) Basic cylinder with integrated guide rods Long stroke

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

LEF-OM002xx

/See 3.3.Step data setting on p.23 3.4.Parameter setting on P .29 /Refer to the LEC controller operation manual. Input the RESET signal. 45 - No.

CNA

MLGC Taper ring Steel ball CNG P q MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking DEven if the air supply is blocked or exhausted, lock release is possible.

MNB

: (800) 258-9200-www.stevenengineering.com 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50

Magnetically Coupled Rodless Cylinder

wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

KR

P. 3 KRL KRT KRU P. 4 P. 4 Use to branch line from female thread in both 90 directions. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 45 male elbow Union tee Branch Use to pipe in 45 angle direction from female thread.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

VQ5000

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing bearing CX 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

Model Selection 1

4 P. 17-5-117 Elbow LQ2L 5 VXA 2 VN 3 Female LVC 4 P. 17-5-118 5 LVA 2 LVH 3 Male LVD 4 P. 17-5-119 Run tee LQ2R 5 LVQ 2 LQ 3 Female LVN 4 P. 17-5-120 5 TI/ TIL 2 PA 3 Male PAX 4 P. 17-5-121 Branch tee LQ2B 5 PB 2 3 Female 4 P. 17-5-122 5 2 3 Union elbow LQ2E 4 P. 17-5-123 5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

: (800) 258-9200-www.stevenengineering.com 150 40 400 50 CX 50 100 32 40 40 32 25 20 D200 32 25 20 50 100 25 -X 0 0 20 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 20Load weight m (kg) Operating pressure P (MPa) Operating pressure P (MPa) Data Graph (5) up to 500 mm/s Graph (8) up to 450 mm/s 160 700 80 80 140 600 10 120 500 Load weight m (kg) Load weight m

JIS Standard Hydraulic Cylinder

GA J M GA R MM MM D E D E Width across flats G Width across flats G C MA MA B F T Air release A K K F T NA NA A S + Stroke H + Stroke H ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) B C F R J M T GA NA P S 32 25 to 800 38 58 M10 x 1.25 32 11 3/8 158 16 39 37 11 40 25 to 800 65 45 32 M10 x 1.25 11 3/8 12 158 42 36 11 50 25 to 800 52 76 M10 x 1.25 40 11 1/2 176 15 46 43 13 63 25 to 800

High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) Production discontinued XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

Thermo-con/Rack Mount Type

Option symbol P High-Pressure Pump Mounted P HECR Applicable model HECR002-A5-P HECR004-A5-P HECR006-A5-P HECR008-A5-P HECR010-A2-P HECR008-W5-P HECR012-W2-P High-pressure pump mounted Possible to choose a high-pressure pump in accordance with users piping resistance.

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Auto Switch Guide

Indication Type P. 10-20-23 Band, Rail, Tie-rod Mounting MK(2) RS Q G RS H A RZQ MI W S CEP1 P. 10-20-26 Solid State Switches CE1 CE2 General Purpose Type P. 10-20-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 10-20-37 Direct Mounting 2-color Indication Type P. 10-20-42 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type with Diagnostic Output P. 10-20-