ZP

F Y F E Y E Y 3 4 4 18 40 34 C A B D C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB

ZP

Y Model A B C D Flat Model ZPT40D10-6-A14 55 124 Flat with ribs U C ZPT50 -6-A14 U C ZPT40D20-6-A14 ZPT40 -6-A14 65 127 50 18.5 32 6.5 3.3 40 43 ZPT40D30-6-A14 75 137 19.5 33 7.5 3.8 50 53 ZPT40D50-6-A14 95 182 75 Dimensions by Stroke 40 50 G Model E F E F U C ZPT 20-6-A14 U C ZPT 30-6-A14 U C ZPT 50-6-A14 U C ZPT 10-6-A14 113.5 45.5 114.5 44.5 116.5 55.5 117.5 50 54.5 126.5 65.5 127.5 64.5

ZP

F Y F E Y E Y 3 4 4 18 40 34 C A B D C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB

5-Port Solenoid Valve

4, 2 (A, B) 1 4/2 (P A/B) 4/2 3/5 (A/B E) C [dm3/(sbar)] b C [dm3/(sbar)] b SY30M-50-1A(E) C8 C6 0.6 0.18 1.4 0.29 SY50M-50-1A(E) C10 C8 1.6 0.20 3.1 0.23 SY70M-50-1A(E) C12 C12 3.1 0.18 4.3 0.32 * Calculation of effective area S and sonic conductance C: S = 5.0 x C * The value is for manifold base with 5 stations, rubber seal, and individually operated 2-position type. * For connector

Table of Contents

valve model Nil Symbol Electrical entry Symbol Rated voltage 1 100 VAC, 50/60 Hz VFR30 VFR31 VFR34 Non-locking push type A (Extended) VFR30 VFR31 F Nil A Plug-in 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 1 G GS Grommet Locking type B (Tool required) B 5 24 VDC E EZ Grommet terminal 6 12 VDC Locking type C (Lever) C 7 240 VAC, 50/60 Hz Conduit terminal T TZ

Compact Cylinder

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 120 145 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 120 145 Cylinder model C Mounting bolt part no. Mounting bolt part no.

ZP

D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C

Hydraulic

E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50

Table of Contents

Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) Over 200 st Over 50 st to 100 st Over 50 st to 100 st Over 200 st Over 100 st to 200 st Over 100 st to 200 st Over 50 st to 200 st 50 st or less Over 200 st Over 50 st to 200 st 50 st or less 50 st or less 50 st or less Over 200 st 32 40 50 63 32 40 50 63 81 118 140

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

V100

override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With

AC Servo Motor Driver (Pulse input type/Positioning type ）

750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Battery-less

F A F Lr LES25 LES25 Lr = 100 mm LES25 0.60 0.12 0.030 LES25 E-150 LES25 E-150 LES25 E-30 LES25 E-125 Table displacement [mm] Table displacement [mm] Table displacement [mm] LES25 E-125 LES25 E-50 LES25 E-100 0.40 0.08 0.020 LES25 E-75 LES25 E-75 LES25 E-75 LES25 E-100 LES25 E-50 0.04 0.010 0.20 LES25 E-30 LES25 E-100/125/150 LES25 E-50 LES25 E-30 0.00 0.000 0.00 0 20 40 60 80 0 20 40 60

Made to Order

OL) HA: T-slot for hexagon bolt X0.02 R T X0.02 DA DB HT H VA VB U X PW 2 x P (Plug) FA PA + Stroke GA FC GB GC S Q 2 x P PB 6H9 depth 10 JC 6H9 depth 10 FB A + Stroke B + Stroke C + Stroke E G K J JA JB (mm) E A DB G FB FC FA DA C B GA GB GC H HA Bore size Standard stroke Over 200 st Over 50 st 200 st or less 50 st or less Over 200 st Over 50 st 200 st or less 50 st or less 80 100 34 41

smcmaintenancepartslist

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G Replacement Parts Description Note Material Part no. No.

Electric Actuators

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Modular Design with Uniform Body Style

AC30-D Y400-D 5.2 51 19.2 71 AC40-D Y500-D 5.2 54 21.2 71 AC40-06-D Model A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AC20-D Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AC30-D Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AC40-D Y500T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AC40-06-D Y600T-D 6.2 140 60 115 50 70 20 11 31.2 8 70 AC50-D AC60-D Y600-D 6.2

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Vacuum Pad

F Y F E Y E Y 3 4 4 18 40 34 C A B D C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB