Series SV R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
Unit Series AC20D to 40D Dimensions AC20D A F N E P K C G G IN OUT Q F.R.L.
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100
N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.
11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 ( ): Denotes the Normally Open (N.O.) dimensions. 143 VXD Series For Air/Water/Oil 5 C 6 D Dimensions/VXD2 /
With light/surge voltage suppresser 10-SYJ300 For AC Note) 0.36 23 (AR) For AC M5 x 0.8 With light/surge voltage suppresser 50 60 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 P.659 Push-turn locking slotted type 50 60 DIN terminal 10-SYJ500 1.2 23 (AR) 1/8 (SYJ500, 700 only) Push-turn locking lever type P.671 M8 Connector 10-SYJ700 2.7 23 (AR) 1/81/4 P.684 Note) All standard AC
(g) JIS Symbol Double acting, Spring rod Stroke (mm) Model 40 50 60 70 80 90 100 43 (53) 49 (59) 50 (65) C(D)U6-D 64 (74) 72 (82) 80 (90) C(D)U10-D 92 (122) 104 (134) 116 (146) C(D)U16-D 216 (253) 238 (275) 260 (297) 282 (319) 304 (341) C(D)U20-D Made to Order Specifications (For details, refer to P.43.) 363 (422) 397 (456) 431 (490) 465 (524) 499 (558) C(D)U25-D Symbol Specifications
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
P1 Nil Rc 1/8 TN NPT 1/8 TF G 1/8 40 18 8 245.5 11 9 47 39 275.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1286 K series Pin Clamp Cylinder Series CKQ K/CLKQ K G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch K C 50 177 R A L P4DWSC C KQG Built-in strong magnet With magnetic field resistant auto switch K C 50 198 R A L P79WSE C KQP With lock on the clamp side Number
type B (Tool required) (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center (B) (A) 4 2 Option 4 (EA)(P)(EB) 5 1 3 C : Locking type C (Lever) 3 position pressure center (B) (A) 4 2 5 (EA)(P)(EB) 5 1 3 Option How to Order Pilot Valve Assembly SF4 70 F 1 Coil rated voltage Manual override Symbol Rated voltage Non-locking push type Non-locking push type A (Extended) Nil
Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L 24 15 5.5 3 30 5 10 2.75 33 Y30L 35 16 7 4 41 7 11 3.5 45 Y40L 40 22 9 4 50 7 14 4.5 50 Y50L 40 22 9 4 50 7 14 4.5 50 Y60L 50 24 12 4 70 10 15 6 62.5 T TYPE BRACKET H O W T O O R D E R T T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10T .B110T 2000 S E R I E S Y20T
SX (MIL-C-83503 conformity) When P/R ports are located on the D side, the designated P/R ports on the other side are plugged.
0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 694 Cylinder with Lock Series MNB Selection Graph Graph (5) Graph (2) P P 100 80 63 100 CLJ2 50 40 80 m m 63 CLM2 32 50 40 CLG1 32 CL1 MLGC CNG MNB V V CNA Graph (6) Graph (3) P P CNS 100 80 CLS 63 100 50 40 CLQ 80 63 50 m m RLQ 32 40 MLU 32 !"
192 A Accumulator P. 193 Adjustment sensitivity (Hysteresis) P. 197 Air-cooled condenser P. 192 Analog communication P. 199 ARW width (Anti-Reset Windup width) P. 197 Auto-tuning P. 197 B Band width, Temperature upper/lower limit width P. 197 Breaker P. 198 C Capillary tube P. 192 Cascade pump P. 194 CE marking P. 199 Centrifugal pump P. 194 CFC refrigerant P. 192 Check valve P. 195 HRG
x 0.8 2-P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5
12 VDC 24 VDC 100 VAC 200 VAC 4/2 5/3 (A/B R1/R2) 110 VAC 220 VAC 50/60 Hz 50/60 Hz 3-position (Closed center) Double Single Metal seal (F/L kit only) VQ100 0.72 0.72 Base Mounted Series VQ1000 Rubber seal 1.0 0.65 Plug-in VQ101 P. 15 P. 7 Metal seal (F/L kit only) Series VQ2000 2.6 2.0 VQ200 Rubber seal 3.2 2.2 VQ201 P. 15 P. 11 1 Series VQ1000 Series VQ2000 A variety of common wiring
43 P 25 40 65 90 P 30 50 70 90 Model CXWM10-25 CXWM10-50 CXWM10-75 CXWM10-100 Model CXWL10-25 CXWL10-50 CXWL10-75 CXWL10-100 53 53 CXWM20, CXWL20, CXWM32, CXWL32 F P 4-J Herical insert thread depth K CXWM25 CXWL25 F 28.5 31 33.5 33.5 46 58.5 71 83.5 F 31.5 31.5 56.5 56.5 69 81.5 94 106.5 P 25 45 65 90 90 90 90 90 P 65 90 65 90 90 90 90 90 I I Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm
High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for
steel 3/8 15 18 0.35 5.0 3.9 4.5 JSXD41-C Sm03 720 1/2 20 5.5 4.6 5.5 JSXD41-C Sm04 720 50 Brass/Stainless steel 3/4 20 38 0.30 9.5 8.2 9.5 JSXD51-C Sm06 880 60 Brass/Stainless steel 1 25 225 11.0 13.0 JSXD61-C Sm10 1460 70 Bronze 1 1/4, 32A 35 415 19.6 23.0 0.03 1.0 JSXD71-Bm(12, 32) 5500/3000 80 Bronze 1 1/2, 40A 40 560 26.4 31.0 JSXD81-Bm(14, 40) 6900/4100 90 Bronze 2, 50A 50 880 42.8