5-Port Solenoid Valve 41 p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53
263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 L L1 L2 90 Series VFR5000 Manifold Option Parts Assembly Plug-in type, Non plug-in type Interface regulator/P port regulation ARBF5050-00-P-1 (Plug-in type) ARBF5050-00-P-2 (Non plug-in type) Individual SUP spacer VVFS5000-P-04-1 (Plug-in type) VVFS5000-P-04-2 (Non plug-in type) Interface regulator Individual SUP
IP65 2 outputs ZSE/ISE20B p. 11 IP65 2 outputs ZSE/ISE20C p. 19 Air General fluids Pressure range Pressure range 100 kPa 0 100 kPa 500 kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 2 MPa 5 MPa 101 kPa 101 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 100 kPa 100 kPa 100 kPa 100 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa Withstand pressure 2 MPa
Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1
L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.
VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.
90-VQ2000-X121 D-sub Connector P.5 P.7 P.7 Plug-in Unit Base Mounted Air Preparation Equipment 3 Port Solenoid Valve Pilot Operated Poppet Type 90-AFF 90-AM 90-AMD 90-IDG 90-SFD 90-AMP 90-VP300/500 P.42 P.43 P.44 P.45 P.46 P.47 Main Line Filter Mist Separator Micro Mist Separator Membrane Air Dryer Clean Air Filter Exhaust Cleaner for Clean Room P.8 3 Port Solenoid Valve Pilot Operated Poppet
P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P
Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.
500 3.0 3.0 3.0 3.0 500 600 600 600 LTF 500 2.5 2.5 2.5 2.5 Tact time (sec) Tact time (sec) Tact time (sec) Tact time (sec) 800 800 800 LC1 600 1000 1000 1000 2.0 2.0 2.0 2.0 800 LC7 1.5 1.5 1.5 1.5 LC8 1000 1.0 1.0 1.0 1.0 LXF 0.5 0.5 0.5 0.5 LXP 0 0 500 1000 0 0 500 1000 0 0 500 1000 0 0 500 1000 LXS Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Note) Tact time may vary depending on
L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.
port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.
The PC or PLC...etc may not be able to monitor a brief change in the P-OT or N-OT signal to P-OT=1 or N-OT=1.
P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P
MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100
A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min. B Nonadsorption ON Switch output 1(2) OFF Work 1 Work 2 Work n Atmosphere ZSE ISE Switch output response time when autoshift is input.
Positioning driver Model Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Yawing 15.7 7.84 LXS Model Load movement direction 1000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment L1 (mm) L3 (mm) Pitching a = 1000 to 3000 a m 500 Mep 5 9 0 L1 Transfer load m (kg) 1000 Yawing 500 a
Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke (mm) 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18