5 Port Solenoid Valve Series SY3000/5000/7000/9000

VP4 S0700 VQ (B) 2 (A) 4 (B) 2 (B) 2 JIS Symbol 100 VQ4 (A) 4 (A) 4 Effective area (Cv factor)% VQ5 5 3 (EB) (EA) 5 3 (EB) (EA) 5 3 75 (EA) (EB) VQC 50 1 (P) 1 (P) 1 (P) VQZ 0.1 0.15 0.2 0.25 Set pressure (MPa) P port regulated A port regulated (P controlled, A port regulated) B port regulated (P controlled, B port regulated) SQ VFS How to Order Interface Regulator VFR ARBY3000 05 P 2 ARBY5000

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

7ND9071en

Code D33 SST Sensor Dual Module Code D44 Namur Sensor Dual Module Code I02 P+F NJ2-12GK-SN Code I09 P+F NCB2-12GM35-N0 Code I32 Omron E2E-X2Y1 Code I41 P+F NJ4-12GK-SN Code I45 P+F NJ3-18GK-S1N Code I56 IFC 2002-ARKG/UP Code K05 Omron D2VW-5 Code K06 Omron D2VW-01 Code B06 Omron D2VW-01 (ND9100F/P, ND9200F/P and ND9300F/P only) 2.5 Recycling and disposal WARNING (ND9000, ND7000): During automatic

Air Cylinder

st or more 10 st or more 15 to 74 st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion type is not available for 80 and 100.

Cylinder with Lock

18 Construction p. 20 Dimensions p. 21 Auto Switch Mounting p. 24 MWB-UT Series/Lock Unit How to Order/Specifications p. 32 Construction p. 33 Dimensions p. 34 Made to Order Individual Specifications p. 35 Dimensionally Compatible with the MNB Series (-X3000) Simple Specials p. 36 Change of Rod End Shape (-XA0 to XA30) Made to Order Common Specifications p. 38 With Coil Scraper

CNA

Accessories Basic Foot Front flange Rear flange Single clevis Double clevis Center trunnion Mounting P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Rod end nut Standard Pin for clevis Single knuckle joint Option Double knuckle joint (with pin) Rod boot Weight/( ): Value for steel tube (kg) 40 50 63 80 100 Bore size (mm) 1.70 (1.75) 2.70 (2.76) 4.08 (4.12) 7.30 (7.46) 10.80

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Series IDG

IDG3, 3H IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG-EL5 IDG-EL5H IDG-EL10 IDG-EL10H IDG-EL20 IDG-EL20H IDG-EL3 IDG-EL3H 7 Membrane module kit 8 9 IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 13 Membrane Air Dryer Series IDG IDG30, 50, IDG30H, 50H IDG30L, 50L Optional specifications With fitting for purge air discharge (Option: P) OUT IN Purge Purge IDG60, 75, 100 IDG60H, 75H,

IDG

100 Nil None (Standard) P With fitting for purge air discharge 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 S With dew point indicator R Flow direction (Right Left) 5 Standard equipment 10 20 30 50 60 75 100 Note) In the case of two or more options, indicate them alphabetically.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25lV6B/Ball Screw Drive LEFS25lV6B/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Refrigerated Air Dryers

P 40 Q 75 64 Drain tube (O.D. 10, Length approx. 2 m) Drain tube for drain pan of condensed water Power cable holder (Electric wire diameter 18 to 23) Signal cable outlet (Can also be connected on the other side.)

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 K S T V KS KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5

CNA

D-K39C 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, Different sides Data n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8,

CNA

, n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different

Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

CG1

Refer to p.1.7-12 and 1.713.1.