High Vacuum Angle Valve -30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1
C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20%
ZP3EU-TF4JB10 [Weight: 429 g] ZP3EU-TF4JB30 [Weight: 458 g] ZP3EU-TF4JB50 [Weight: 481 g] Rc1/8 Width across flats 17 Width across flats 17 Rc1/8 Bushing Width across flats 30 Width across flats 30 Bushing 19 A B 50 8 8 19 8 8 50 B A Bushing Bushing M22 x 1.5 M22 x 1.5 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) Dimensions Dimensions (Rotating angle) 50 61 Part no.
CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.
V V Interchangeable with the existing model Size 30 V V Size 40 V V V V The new spacer can be connected to the existing AF-A, AR-B, AL-A, and AW-B series.
Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specifications Bracket mounting size Accessory specifications (mm) With pressure gauge With auto-drain Model Port size D C A B H 27 33 N 26 63 66 76 76 P F 25 30 41 50 50 G 20 24 35 40 40 K 4.5 5.5 7 9 9
A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 38 29 26.5 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 5 12 9 11 8 8 37.5 30.5 41.5 32.5 30 38.5 42 36 35 10.5 9 13.5 8.5 13 6 7.5 16 11.5
C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U
to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.
Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR
Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specifications Bracket mounting size Accessory specifications (mm) With pressure gauge With auto-drain Model Port size D C A B H 27 33 N 26 63 66 76 76 P F 25 30 41 50 50 G 20 24 35 40 40 K 4.5 5.5 7 9 9
-01NS 08 8 KQ2H08-01NS F2 30 (Rotating angle) 10 to 32 Model A B C D E 2 F G H J K L M N P Q R S Vacuum inlet direction q Pad dia.
06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange
Limit switch 10 20 30 Nil W None B contact specification 2 pcs.
Metal bowl Optional specifications B B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B O S 1/4 10 One-touch fitting Width across flats 17 O S Standard specification Accessory specification With bracket With auto drain Model Port size A B C D P E F G H J K L M B AFD20 1/8, 1/4 40 97 10 40 18 30 27 22 5.4 8.4 40 2.3 115 AFD30 1/4, 3/8 53 129 14 53 57 16 41 40
30 days based on JIS B 8374-1981) Max. 50C Ambient and fluid temperature Lubrication Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications
B A 10 16 20 Mounting position A 30 24 38 B 130 86 162 Operating range l Note) 4 3 5 MY1M (Slide bearing type) B A 16 20 Mounting position A 73 93 B 87 107 Operating range l Note) 8.5 6.5 MY1C (Cam follower guide type) B A 16 20 Mounting position A 73 93 B 87 107 Operating range l Note) 8.5 6.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 30 24 38 B 130 86 162
For detailed specifications, refer to page 8-30-1. Normally closed (NC = b contact), solid state switch (DF9G/F9H/Y7G/Y7H type) are also available. For details, refer to page 8-30-31to 8-30-32. D-A90 cannot be mounted on Series MY1HT.
Keeper plate Rod end nut 30 d 2 x d L1 0.2 B D C m T H H B Material: Carbon steel Material: Rolled steel Rod series Bore size (mm) Bore size (mm) Cap bolt L1 d H T B m Part no.