XL (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3
),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80
) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 45mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Air Cushion
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 100mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper
Magnet: Built-in, Series: J2, Mounting: Double Clevis, Bore Size: 16mm, Stroke: 45mm, Action: Single Acting, Spring Extend, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: Pivot Bracket shipped w/Product, Not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or
Magnet: Built-in, Series: J2, Mounting: Double Clevis, Bore Size: 16mm, Stroke: 100mm, Action: Single Acting, Spring Return, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: Pivot Bracket shipped w/Product, Not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or
Magnet: Built-in, Series: J2, Mounting: Double Clevis, Bore Size: 16mm, Stroke: 15mm, Action: Single Acting, Spring Return, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: Pivot Bracket shipped w/Product, Not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Air cushion, Auto Switches: None, Lead Wire
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Air cushion, Auto Switches: None, Lead Wire
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: None, Lead
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Air cushion, Auto Switches: None, Lead Wire
(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)