High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

MY1

stopper bolt) 5 (Max. 10) 1.8 10 5 28 5.5 35 40.8 (Shock absorber stroke) 5 Stroke adjusting unit 15.4 8 Shock absorber (RB0805) 13.5 3.5 2.8 Work piece SMC 29.8 11 Series MY1B Mechanically Jointed Rodless Cylinder Standard Type / Dimensions (mm) 16 to 40 MY1B Bore size Stroke 1 in = 25.4 mm (LL) L 4-B depth of counter bore C LD through hole bottom side J depth K PA 4-MM depth M YW QW NW

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Auto Switches: Without auto switch, Lead

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Cushion Type: N (Rubber Bumper), Bore Size: 25mm, Stroke: 50mm, Thread: Male Rod End

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Cushion Type: N (Rubber Bumper), Bore Size: 25mm, Stroke: 200mm, Thread: Male Rod End

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Cushion Type: N (Rubber Bumper), Bore Size: 25mm, Stroke: 25mm, Thread: Male Rod End

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Cushion Type: N (Rubber Bumper), Bore Size: 25mm, Stroke: 250mm, Thread: Male Rod End

Magnet: Built-in, Mounting: Clevis, Style: Non-lube Rubber Bumper, Bore Size: 25mm, Stroke: 100mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Clevis, Style: Non-lube Rubber Bumper, Bore Size: 25mm, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Clevis, Style: Non-lube Rubber Bumper, Bore Size: 25mm, Stroke: 150mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Auto Switches: Without auto switch, Lead

Magnet: Built-in Magnet, Mounting: Clevis, Cushion Type: Rubber Bumper, Bore Size: 25mm, Stroke: 50mm, Thread: Male Rod End, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Mounting: Clevis, Cushion Type: Rubber Bumper, Bore Size: 25mm, Stroke: 200mm, Thread: Male Rod End, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Mounting: Clevis, Cushion Type: Rubber Bumper, Bore Size: 25mm, Stroke: 250mm, Thread: Male Rod End, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

High Vacuum Angle Valve

air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW

XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

XMA/XYA Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00

XMD/XYD Series

) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5

XMH/XYH Series

),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Mass kg Note 4 XYH 0.62 1.37 2.42 Note1) XYH-16 is not available.

Mechanically Jointed Rodless Cylinder Series MY2

Z + Stroke (mm) LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180 LW 104 158 214 A 80 105 165 LC 6 7 7 (LL) 40 49.6 75 LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x 1 N 20 25 40 NT 3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW