Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

Air Cylinder

Return: Double Clevis (D) Stroke CJ2D 10 16 SZ CDH9+0.030 0 Piping port M5 x 0.8 GB NB CJ1 Clevis pin (cdd90.030 0.060) MM Rod end nut C C CJP D CZ 0 0.3 B 0 0.3 CJ2 CJ2 ZZ + Stroke Z + Stroke S + Stroke H A NA CX+0.2 +0.1 B 0 0.3 JCM U U CZ 0 0.3 R R CM2 CM3 CG1 [mm] Bore size A B C CD (cd) CX CZ D GB H MM NA NB R U S 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100

Compact Hydraulic Cylinder

Rod size series B C B series rod size C series rod size Type: Double acting/Double Rod CH2 F W B LA 50 100 CHD2 F B LA 50 100 M9BW W With Auto Switch With auto switch (built-in magnet) Bore size Made to order specifications For details, refer to page 301. 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Series type Mounting style Symbol E F Tube material Nominal pressure 3.5 MPa 7

Free Mount Cylinder

E Size Variations Standard stroke Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting style auto switch C(D)U25 C(D)U32 47 49 Free Mount Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A M9B CDU Without auto switch With auto switch Number of auto switches Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9B, Lead

Bore Size: 63mm, Port Type: Rc (PT), Stroke: 100mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9B, Lead

NCG/CG1

A MM A1 E1 L1 NX NDH10 Type C 12 for axis 0.050 0.093 Type C 14 for axis 0.050 0.093 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 25 30 30 40 50 55 M8 x 1.25 34 41 42 56 71 79 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 18 22 28 32 8 10 10 14 18 22 +0.058 0 0.2 0.4 Type C 16 for axis 0.050 0.093 M10 x 1.25 +0.058 0 0.2 0.4 Type C

NCM

NCDMB075-0400-M9B-X169US NCDMB(075 to 200)Stroke (C)-X169US ZB + STROKE W B-DIA.

Rotary Actuator/Vane Type

Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Free Mount Cylinder Series CU

D U 16 30 D M9B 21 C D U 16 30 D M9B Cylinder stroke (mm) Copper, fluorine and silicon-free + low particle generation Number of auto switches 2 pcs. 1 pc. n pcs.

Smooth Cylinder/Low Speed Cylinder

Refer to page 1953 for details. 1202 Smooth Cylinder Series CG1Y 20, 25, 32, 40, 50, 63, 80, 100 How to Order L 25 100 CG1Y L M9BW 25 100 C CDG1Y With auto switch With auto switch (Built-in magnet) Made to Order For details, refer to page 1204.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Air Cylinder Series MB

100 125 Up to 500 50 55 70 80 100 120 138 7 9 9 9 12 14 14 10 10 12 12 16 16 20 64 72 90 100 126 150 180 32 36 45 50 63 75 102 79 90 110 120 153 178 216 141 145 164 164 202 202 237 Up to 500 CS1 Up to 600 Up to 600 CS2 Up to 800 Up to 800 Up to 1000 Without Air Cushion Single clevis style (C) Bore size (mm) Z ZZ Port Cushion valve 32 40 50, 63 80, 100 125 160 164 190 238 279 170.5 175 205

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

5

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,