Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

150 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 120 145 C' D' 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 50 55 60 65 70 75 80 85 90 125 150 CQ2KB40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB63

Air Slide Table

Model Stroke MXQ8(A, C) 50, 75 MXQ12(A, C) 75, 100 MXQ16(A) 100, 125 MXQ20(A) 100, 125, 150 MXQ25(A) 125, 150 MXQ6B 50, 75 MXQ8B 75, 100 MXQ12B 100, 125 MXQ16B 100, 125, 150 MXQ20B 125, 150 159 Model Selection MXQ Series Selection Example 1 (Transfer, Table Mounting) Selection Example 2 (Transfer, End Plate Mounting) Selection conditions Selected model: MXQ8B-30ZEJ Load mass: 0.3 kg Average

XM, XY

80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177 B 80 100 117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal

Free Mount Cylinder Series CU

Proper tightening torque (Nm) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) 1.08 10% 2.45 10% 5.10 10% 8.04 10% 6, 10 16 20, 25 32 M3 M4 M5 M6 C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

C DH7 EN 0 0.1 ER (Max.)

CQS

For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

48

Connector C (Terminal no.) Cable length(L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 (5.7) Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C 10 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

How to Order M9N A 25 XMD XYD Angle type M9N A 25 In-line type 1 2 3 4 5 6 7 2. Flange type 1. Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

CHKD/CHKG

CHKGL--XC64 A C C B 293

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Compact

6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

2

with product) Connected to VBA20A, 40A Connected to VBA22A, 42A Tank IN port Rc 1/2 Booster regulator IN port C Booster regulator IN port C Spare port Rc 1/2 Spare port Rc 1/2 EXH: C EXH: C Tank OUT port Rc 3/4 (A) (A) (B) (B) OUT OUT 355 252 252 205 4 x 13 50 50 Drain port Rc 1/4 Drain valve 150 150 500 250 250 851 Booster regulator model A B C D VBA20A 531 444 Rc 3/8 VBA40A 570 479.8

e

(Wn) Mass (mn) Y-axis Yn Z-axis Zn X-axis Xn LXS LXS Z X Wa 5 mm 0 mm 0.88 kg 65 mm LC6m LC6m 111 Wb 42.5 mm 0 mm 4.35 kg 150 mm Y 210 Y Wc LZm LZm 42.5 mm 111 mm 0.795 kg 150 mm Wd 42.5 mm 210 mm 1.0 kg 150 mm LC3F2 LC3F2 n = a, b, c, d 3 Calculation of Composite Center of Gravity Xm Xm m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg D-m D-m E-MY E-MY 1 m3 X = x (mn x xn) 1 7.025 = (0.88

Rotary Table/Rack & Pinion Style Series MSQ

Positioning pin hole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a e is -c d w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w o 0 u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n g e 5 9 ra With adjust bolt

Rotary Clamp Cylinders

Auto switch mounting surface Bore size (mm) 20, 25 32, 40, 50 63 Port side Port side Port side C A C A C A B B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model A, B, C side Port side A, B, C side Port, A, B, C side qBQ-2 wBQ2-012 Two types of auto switch mounting bracket are used as a set.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 48 200 213 4 175 188 15 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 37.5 50 88 75 250 225 54 200 213 4 175 188 17 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 25 37.5 50 88 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125 275 51 75 112 250 64 12.5 25 37.5 50 100 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125

CE

bore size (mm) D C d H B C D Part no.

CE

bore size (mm) D C d H B C D Part no.