Bore Size: 25mm, Port Type: Rc (PT), Stroke: 50mm, Lock Position: R (Front Lock), Manual Override: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Bore Size: 63mm, Port Type: N (NPT), Stroke: 50mm, Lock Position: R (Front Lock), Manual Override: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9B, Lead

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9B, Lead

Bore Size: 25mm, Port Type: Rc (PT), Stroke: 50mm, Lock Position: Front Lock, Manual Override: Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 63mm, Port Type: NPT, Stroke: 50mm, Lock Position: Front Lock, Manual Override: Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

End lock cylinder, CBG1, Double acting, single rod, 7 mounting styles available, Bore sizes *: 20, 25, 32, 40, 50, 63, 80 and 100, Rubber bumper or air cushion standard, Auto-switch capability, CBG1, End Lock Cylinder, ROUND BODY CYLINDER, 331

End lock cylinder, CBG1, Double acting, single rod, 7 mounting styles available, Bore sizes *: 20, 25, 32, 40, 50, 63, 80 and 100, Rubber bumper or air cushion standard, Auto-switch capability, CBG1, End Lock Cylinder, ROUND BODY CYLINDER, 331

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

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50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Table of Contents

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

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1.15 24 7 11 4 22 40 38.4 29 4 70.5 56 40 0.050 0.093 IY-G04SUS 50, 63 40 CG-E050SUS 10 14 Type C 10 for axis 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 0.065 0.117 IY-G05SUS 80, 100 50, 63 CG-E080SUS 14 22 Type C 14 for axis 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 IY-G08SUS 80 18 Type C 18 for axis 17 64 56.2 2.55 1.35 IY-G10SUS 100 22 Type C

&snac

r a c h l o r i d e , e t c , 5 u r f u r i c a c i d , n i t r i c a c i d , h y d r o c h l o r i c a c i d , a c e t i c a c i d , I a t i c a c i d , c h r o m i c a c i d , e t c , C n l o r i n e , s u l f u r o u s a c i d , h y d r o g e n s u l f i d e , b r o I I ] i n e , e t H y d r a u l i c f l u i d ( P h o s p h a t i c e s t e r ) , f u e l o i l , k e r o s e n e , v /

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Rotary Actuator/Vane Type

Clockwise CRQ2 Stopper ring Block C Hatched area represents a stopper lever.