CYPSeries

1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL

MGP

RN RL HN HL RN RL 0.05 0.36 0.07 0.05 0.06 0.40 0.35 0.39 20 63 0.06 0.90 0.07 0.05 0.07 0.97 1.03 1.10 25 80 0.09 1.52 0.10 0.09 0.10 1.60 1.60 1.68 32 100 0.15 0.18 0.14 0.18 40 Calculation (example) MGPM50-100-HN Basic weight + Lock unit additional weight 5.74 + 0.24 = 5.99kg 0.24 0.27 0.23 0.27 50 Allowable Rotational Torque of Plate Non-rotating Accuracy of Plate Torque: T (Nm) +

Clean Room Rodless Cylinder Series CYP ø15, ø32

CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL

24

4.37 4.73 5.51 6.23 6.95 7.67 50 3.46 4.21 4.76 5.40 5.95 6.50 7.05 7.60 8.83 9.92 11.1 12.2 63 4.33 5.20 5.86 6.62 7.28 7.95 8.61 9.27 10.7 12.1 13.4 14.7 80 8.05 8.87 9.66 10.5 11.4 12.2 13.0 14.1 15.7 17.4 19.0 20.7 100 12.4 13.5 14.7 15.9 17.1 18.3 19.4 20.9 23.2 25.6 27.9 30.3 Lock Unit Additional Weight [kg] MGJ Head end lock Rod end lock Head end lock Rod end lock Bore size [mm] HN HL

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

Shock Absorbers and Rate Controls

(E(l 0plindl lSoxllm/horr (hl [[r. Shorl torce (t{} lloninul (oil Spring tore (tDl Illor. Propellinq Iorie (NI 0plindl Yelo.ity Rdnqe (n/s;.) Eore J|le (nrn) ts) Sirol (nn) ttlodel W.iqhl ll!-l klerded (Nl (rn?

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

MG

RN RL HN HL RN RL 0.05 0.36 0.07 0.05 0.06 0.40 0.35 0.39 20 63 0.06 0.90 0.07 0.05 0.07 0.97 1.03 1.10 25 80 0.09 1.52 0.10 0.09 0.10 1.60 1.60 1.68 32 100 0.15 0.18 0.14 0.18 40 Calculation: (Example) MGPM50-100-HN Basic weight + Lock unit additional weight 5.74 + 0.24 = 5.98 kg 0.24 0.27 0.23 0.27 50 Non-rotating Accuracy of Plate Allowable Rotational Torque of Plate Torque: T (Nm)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Environment

1500 1500 1500 1000 1000 1000 1000 L7 [mm] L7 [mm] L7 [mm] L7 [mm] Y 500 500 500 500 Mey m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work

15

10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30

2

0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 183 Regulator Series AR10-A to AR40-A Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa,

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 250mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: L (Locking)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 50mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: L (Locking)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 200mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 150mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type)