Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

PF2M7.eng

PF2M7-B.eng:PF2M7-B.eng.qxd 21/04/09 14:02 1 Before Use Digital Flow Switch PF2M7## Wiring Wiring of connector Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring. Otherwise, malfunction may result due to noise.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Body Size: 4 (1/4 Standard), Port Size: 02 (R1/4), Applicable Tubing O.D.: 06S (ø6mm)

ASP

ASP330F-01-06S-X12 With seal Pilot check valve Body size Applicable tubing O.D.

Model: Flow Valve, Size: 1/4 Standard, Port Size: 1/4, Applicable Tubing O.D.: 1/4", Option: Fixed set pressure type (0.2 MPa), Thread: NPT

PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20