Size: 3 (1/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø6, Sealant: S [Sealant (01,02,03,04)], Option: None, Made to Order: None, Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types of

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types of Screw: R, Applicable Tube O.D. mm

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types of Screw: R, Applicable Tube O.D. mm(

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types of Screw: R, Applicable Tube O.D. mm

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 330, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread +

Size: 1/8, 1/4 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: 1/4, Tube Size: Ø6, Option: Sealant, Lock Nut: J (Round)

Body Size: 3/8 Basis, Thread: M5 Metric/10-32UNF/R(PT), Port Size: 1/4, Applicable Tube OD: Ø6 mm, Sealant: Sealant, Lock Nut: Round

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: With Seal, Types

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Modular F.R.L. Unit

) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E