SX

-C6 Applicable series Symbol Port size M5 x 0.8 12 12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

4/5 Port Solenoid Valve

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS2301F-06 AN120-M5 AS2001F-06 Series CJ2 Series CM2 4 x 1 m AS1301F-04 AN120-M5 Base mounted Tubing bore x Length Speed controller Silencer Body ported Tubing bore x Length Speed controller Silencer SYJ3140-M5 SYJ3120-M3 2 Series SYJ3000 How to Order Light/surge voltage suppressor Bracket

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZ1120--M5 (Piping: 6 x 1 m) VZS VFS VS4 AS2001F-06/AN120-M5 AS2301F-M5-06/AN120-M5 Speed controller/Silencer It is when the cylinder

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

AIR COMBINATION

*-A AR30-A AFM30-A AL30-A AR30-A AFM30-A AL30-A AR30-A AF40-A AF40-A AW40-A AF40-A AW40-A AC40*-A AR40-A AFM40-A AL40-A AR40-A AFM40-A AL40-A AR40-A AF40-06-A AF40-06-A AW40-06-A AF40-06-A AW40-06-A AC40*-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A 10 Option / Semi-standard : Select one each for a to m.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Base mounted Tubing diameter x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS2002F-06 AN120-M5 AS2002F-06 Series CJ2 Series CM2 4 x 1 m AS1002F-04 AN120-M5 Body ported Tubing diameter x Length Speed controller Silencer 10-SYJ3143-M5 10-SYJ3123-M3 284 4/5 Port Solenoid Valve 10-SYJ3000 How to Order Note

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

KB

KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CS1 SGP20A x 1 m AS500-06 AN500-06 Tube bore x Length Speed controller Silencer VFS5100-06 Double Check Spacer/Specifications Specifications Check Valve Operation Can hold an intermediate cylinder position for an extended time If the double check spacer with a built-in double check valve is combined, it will enable

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

AW

Symbol Body size Description 10 20 30 40 60 Without backflow function With backflow function Nil K Note 1) With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N Note 2) F Note 3) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Mounting Without mounting option With bracket With set nut (for panel fitting) a Nil B Note 5) H + Without auto drain Float type auto drain

Modular F.R.L. Units

-A AFD40-A AC AFARAL AWAL AFAR AFAFMAR AWAFM AF AFM / AFD AR AL AW Attachment Model Port size Fluid Ambient and fluid temperature Proof pressure Maximum operating pressure Minimum operating pressure 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A Nominal filtration rating Outlet

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.