Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

Shock Absorbers and Rate Controls

SQUARE FLANGE (SD Lock / srot a ffi t I l ] T @ -l f.-.' (.iolog l{0.

SI unit for CC-Link

An example of when the SI unit station number is set to 01 is shown below.

Plug-in/Plug Lead: Single Unit

(Noise reduction of 35 dB or more) Note) Note that when excessive drainage occurs in the air supply, the drainage will be released along with the exhaust. 71.2 68.2 58.8 107.8 SMC 122 2 B SMC 1 P 69 Type SD 12 3 X 5 R1 R2 PE 4 A Note) The drawing shows a VV5Q51--SD.

Profi-E

P For D PV0 Baud rat e ( N ot e) 9. 6k/19. 2k/45. 45k/93. 75k/187. 5k /500k/1. 5M /3M /6M /12M bps Set by m ast er G SD Fi l e SM C_1412.

SI unit for CC-Link

An example of when the SI unit station number is set to 01 is shown below.

AC Servo Motor Driver (SSCNET /H Type)

8E.1 USB communication receive error SD 8E.2 USB communication checksum error SD 8E.3 USB communication character error SD 8E USB communication error 8E.4 USB communication command error SD 8E.5 USB communication data number error SD 888 Watchdog 88._ Watchdog DB Note 1.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

VQ5000

(Noise reduction of 35dB or more) Note ) If a large amount of drainage is generated at the air supply, note that drainage will be discharged together with the exhaust air. 71.2 68.2 58.8 107.8 SMC 122 2 B SMC 1 P 69 SD type 12 3 X 5 R1 R2 PE 4 A Note) The drawing shows a VV5Q51--SD SU type 36 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts Manifold mounted

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(Noise reduction of 35dB or more) Note ) If a large amount of drainage is generated at the air supply, note that drainage will be discharged together with the exhaust air. 71.2 68.2 58.8 107.8 SMC 122 2 B SMC 1 P 69 SD type 12 3 X 5 R1 R2 PE 4 A Note) The drawing shows a VV5Q51--SD SU type 36 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts Manifold mounted

Thermo-chiller/Rack Mount Type

+ SD SG 1 SD+ 9 SD 5 SG 1 SD+ 9 SD 5 SG Circuit diagram Terminal resistance 120 Master This product This product (1st slave) (31st slave) Be sure to wire to the correct pin numbers according to the diagram.

Table of Contents

ZSE1-01-15CN1 pc.

0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

0.4

RD SD RUN POWER 120 80 10.6 4 46.2 ERR T/R RUN MODEL SB (SI No.EX124-SMB1) 0 1 DIP SW. L8 = 16n + 118.5 100 Drawing shows a SC case.

0.4

VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

DOC1003626

Terminal resistance Terminal resistance 2 2 2 7 5 7 5 7 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Controller This product (First device) This product This product (31st device) (Second device) Do not connect any wire to other PIN numbers.