CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Round Type Low Pressure Hydraulic Cylinder Series CH
M

, D-C8 D-H7, D-H7W, D-H7F, D-H7BAL Approx.

REC

(Including band and screw) J Applicable auto switch Bore size (mm) 20 25 40 32 DD-C7, D-C80 D-C73C, D-C80C Reed -X BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7, D-H7C D-H7W, D-H7NF,D-H7BAL D-B5, D-B64, D-B59W D-G5NTL Reed D-A3, D-A44 Solid state 20Reed Solid state BA-32 BA-01 BA-02 BA-04 Data BD1-01M BD1-02M BD1-02 BD1-04M Solid state D-G39, D-K39 Mounting screws set made of stainless steel

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Auto switch types D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Standard strokes (mm) Bore size (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 25 to 1000 50

CLA

Auto Switch Mounting Bore size Auto switch D-S5/S6/SS9W BA-04 SA-OS D-G5D IK59/G5 DWIK59W SA-OS SA-OB BA-lO 50 40 63 80 100 D-A5/A6IA59W D-FS D/JS D/FS DW/JS9W BT-04 BT-04 ST-06 ST-OB BT-OB D-FSNTL, FSSAL, FS9F O-A3/A44/G39/K39 BD1-04M BD1 -0SM SD1-0SM SOl-0BM SD1 -l0M D-GSSAUG59F/GSNTL D-A3 DC/A44C/G39CIK39C BA3-0S0 SA3-040 BA3-063 SA3-0BO BA3-100 D-A3 DCfA.44CfG39C/K39C: come With mounting

High Power Cylinder:

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

•

J Gas~et ,fd(~speed ,c:o..ntroJ.ler NBR CK40-1697 Clamp Cylinder: Series CK1 Auto Switch Specifications Applicable Auto Switch Auto switch type Mount type Auto switch model Electrical entry Length of lead w ire D-B5 B6 tYo. D-B7 . B8 type Grommet type O.5m (Standard) 3m (Option) Reed switch type Band mount D-A3 type Terminal conduit type D-A4 type DIN connector type D-G7. K7 type D-G5.

-fl Seies

qn D N coreclor.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

AR10-A: Rc1/16
AR20-A to AR40-A, AR20(K)-B to AR60(K)-B, and AR20(K)-D to AR40(K)-D: Rc1/8
Old AR10: Rc1/16
Old AR20(K) to AR30(K): Rc1/8
Old AR40(K) to AR60(K): Rc1/4
Old AR1000: Rc1/16
Old AR2000 to AR3000: Rc1/8
Old AR4000 to AR6000: Rc1/4

The refreshed AR series with 2 digits and an “A” suffix (AR40-□□-A) was released in April 2012. The refreshed AR series with 2 digits and a “B” suffix (AR40-□□-B) was released in May 2012. And the new design AR series with 2 digits and a “D” suffix (AR40-□□-D) was released in October 2019.

AR10-A: Rc1/16
AR20-A to AR40-A, AR20(K)-B to AR60(K)-B, and AR20(K)-D to AR40(K)-D: Rc1/8
Old AR10: Rc1/16
Old AR20(K) to AR30(K): Rc1/8
Old AR40(K) to AR60(K): Rc1/4
Old AR1000: Rc1/16
Old AR2000 to AR3000: Rc1/8
Old AR4000 to AR6000: Rc1/4

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

ZB-OM00301

N.C. 0.55MPa 0.1MPa 0.55MPa 0.55MPa 0.1MPa -0.1MPa 0.1MPa 0MPa 5ms 5ms 5ms ON3.5ms OFF2ms DC24 0.7W29mA2 0.7W29mA2 1W42mA 1W42mA DC12 0.7W29mA2 0.7W58mA2 1W83mA 1W42mA L M 3 10.30.4 23.1W10ms 0.7W 3/M 32 - No.ZB-OM00301 1 03M 04M 05M 06H N.C. N.C. N.C. N.C.

Size: 1/2, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/2, Accessory: M [Round Pressure Gauge (with Color Zone)], Option 1: -, Option 2: -

Process Pump

D-DN

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/2, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side