CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

NPT G Nil Rc Rc 1/4 20 VZS 20 stations 00F 00N 3/5(R) port NPTF 00T VFS Rc 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Usable No. of Solenoids Model Max. no. of solenoids Type 10, Tie-rod base 10-SV1000 to 10-SV4000 23 18 23 10-SV1000 10-SV2000 Type 16, Cassette base 243 D-sub Connector 10-SV Dimensions: Series 10-SV1000 for D-sub Connector U D B 1 2 C3, N1 C4, N3 C6, N7 Cassette base manifold: 10-SS5V1-16FD (R)Stations Directional Control Valves Air Grippers Modular F. R.

SYJ3000/5000/7000

26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7

ZP

(0.3) Applicable pad B10MT/B15MT Applicable pad B20MT/B25MT/B30MT 30 31 R R 4 4 2 2 R R 4 6 10 6 Note) R part has to be smooth with no corners.

High Vacuum Angle Valve

Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 16.5 23.7 (GZ, GS: 24.4) [25.4] P=19 23.5 11.5 122 (GZ, GS: 123.4) [125.4] 0.5 30 16.6 62.8 83.7 (GZ, GS: 84.7) [85.7] 21 2.8 R R R R P A A A A A 63.6 60 P 42 B B B B B 6-Rc(PT)1/4 (P, R port) Manual override L2 10 Depress and turn to operate and lock override.

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

SX

Direction P, R port A, B port specifications C8 (One-touch fitting for 8) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W =

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

Proposals for Energy Saving

-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 D H2 H1 L2 L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17

ZP

(0.3) Applicable pad B10MT/B15MT Applicable pad B20MT/B25MT/B30MT 30 31 R R 4 4 2 2 R R 4 6 10 6 Note) R part has to be smooth with no corners.

SYJ300/500/700

P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6

Table of Contents

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Made to Order

9 10 7 50 93 14 depth 10 75, 100, 125 150, 200 250, 300 M8 x 1.25 depth 16 M12 x 1.75 depth 21 140 16 19 10 120 40 9 45 170 20 100 150 9 25 6.5 9 10 7 50 93 14 depth 10 M14 x 2 depth 25 M10 x 1.5 depth 20 170 19 21 10 150 45 12 50 194 25 120 170 11 26 7 11 12 7 55 103 17 depth 12 Long Stroke Bore size (mm) Bore size (mm) Stroke range (mm) K L M N O PG PL Q R S T U V W XA Y Z R Y X 20 25