Environment

Level Range> Without Load 800 Lead 4: LEY32C Model Pushing speed [mm/s] Pushing force (Setting input value) Model Pushing speed [mm/s] Pushing force (Setting input value) 700 Lead 8: LEY32B 1 to 4 20% to 65% 1 to 4 40% to 95% 600 LEY25 LEY25A 5 to 20 35% to 65% 5 to 20 60% to 95% Lead 16: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35%

0.4

Note 1) 25P Note 1) 26P Top entry 20P Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 17 P. 21 P. 25 P. 29 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Note 2) Note 2) Note 2) Note

45

stations maximum) Mounting position Symbol Stations U side Stations Symbol D U D side U side 2 to 10 stations 02 2 stations Manifold base (5 stations) B 2 to 20 stations Both sides M Special specifications SS5X3-45-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification sheet.

PC Wiring System

Refer to page 44 in CAT.E02-20 about the circuit diagram.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

ITV

output current White Blue Black S1 White Vs Black S2 Vs : Power supply 24 VDC 12 to 15 VDC One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Stability of suction position,

ZP3EA-S1 [Weight: 2.9 g] Part no. ZP3EA-S2 [Weight: 7.6 g] 24 47 15 29 4 20 36 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM Applicable pad part no.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly 13 14 15 NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 1233.

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

AC Servo Motor Driver (MECHATROLINK-III type)

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2.

CC

stroke W S QL QB P NL 200 300 400 500 600 700 800 50 100 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 378.5 503.5 603.5 728.5 228.5 278.5 7 13 2 32 120 5 33 82.5 286 386 511 611 736 836 207 13 2 32 120 5 33 92 524 624 399 749 849 949 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10

CC

stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17