JXCx-OMX0009

F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position *5) Set always OFF(0) 120 - 23.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-3-14.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 14 14 14 14 13 13 14 (13) 14 (13) 13 13 C [dm3/(sbar)] b Cv b 0.28 0.30 0.26 0.30 0.25 0.29 0.32 (0.3) 0.32 (0.3) 0.28 0.28 Cv 3.4 3.8 3.4 3.7 3.0 3.4 3.6 (3.2) 3.6 (3.2) 3.1 3.3 VFRA4111-03

Electric Actuators

T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] L : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s2] (Operating condition) a2: Deceleration [mm/s2] (Operating condition) P T2: Constant speed time can be found from the following equation.

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram PCW-EC08Z00 PCW-EC08Z01 2 4 6 8 10 12 14 20 16 18 Power supply terminal block Input/output connector (CS0) 1 3 5 7 9 11 13 15 17 19 14 8 4 2 6 20 16 18 10 12 Input/output connector (CS1) 13 1 3 5 7 9 11 19 15 17 Green Red Connection 1 1 1 1 1 1 1 1 2 2 2 3 4 3 4 CN2 CN3 2 2 2 3 4 CN5 2 2 1 3 3 3 4 CN4 3 4 3 4 CN6 24VDC 4 CN1 4 2 *S2

Table of Contents

22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Robotic cable only) Cable type Actuator side (14) (18) (Terminal no.)

Mechanically Jointed Rodless Cylinders

B Made to Order For details, refer to page 14.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

LJ1H

AC servo motor S2 PNP, B contact 2pcs. (Incremental encoder) 100 W PNP, A contact 1pc.,B contact 2pcs.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

16 16 14 16 17 14 16 18 9.0 9.0 9.0 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110 VFS5100 1 2

Refrigerated Thermo-chiller

SEMI S8 SEMI S8 is a guideline on ergonomics which is more detailed than the ergonomic requirements in Section 14 of SEMI S2. SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2.

CATALOG

Fixed Eye (1.5 to 14) C MP4 Single Detachable Rear Clevis/Male (1.5 to 14) L MS1 Foot Mount (1.5 to 14) S MS2 Side Lug (1.5 to 14) O MS3 Centerline Lug (1.5 to 14) R MS4 Side-Tapped (1.5 to 14) P .MS7 Front Lug Mount (1.5 to 14) J MT2 Cap Trunnion (1.5 to 14) U MT1 Head Trunnion (1.5 to 14) T MT4 Center Trunnion (1.5 to 14) *See below B MX0 Basic/No Mount (1.5 to 14) BA .

AC Servo Motor Driver (Pulse input type/Positioning type ）

. 14-9 14.3.4 Checksum . 14-9 14.3.5 Time-out processing . 14-9 14.3.6 Retry processing . 14-10 14.3.7 Initialization . 14-10 14.3.8 Communication procedure example . 14-11 14.4 Command and data No. list . 14-12 14.4.1 Reading command . 14-12 14.4.2 Writing commands . 14-18 14.5 Detailed explanations of commands . 14-20 14.5.1 Data processing . 14-20 14.5.2 Status display mode . 14-21 14.5.3

AC Servo Motor Driver (Network card type ）

If the voltage drop (maximum of 5.2 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. 13 13 14. APPLICATION OF FUNCTIONS 14. APPLICATION OF FUNCTIONS .2 14.1 Infinite feed function (setting degree) .2 14 1 14. APPLICATION OF FUNCTIONS 14.

Table of Contents

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Solid State Auto Switches

: 300 m/s2 Note 1) Refer to page 1568 for solid state auto switch common specifications.

JXCx-OMY0006

JXC-OMY0006-A 14.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

14.

Compact Vacuum Unit

(30 m/s2) Without sensor/switch With sensor Enclosure Vibration resistance Note 1) 66 ft/s2 (20 m/s2) (With switch) Note) Push-locking type only for the latching type Without sensor/switch With sensor 490 ft/s2 (150 m/s2) Impact resistance Note 2) 330 ft/s2 (100 m/s2) (With switch) Note 1) 10 to 500 Hz for 2 hours in each direction of X, Y and Z (During de-energizing) Note 2) 3 times in