Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =

ZP

(per buffer stroke) C 30 31 G H: 4 H: 6 Stroke ( ) D E F G J J Dimensions 10 20 30 40 50 11.5 21.5 31.5 41.5 51.5 23 61.5 99.5 109.5 145.5 155.5 a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model 51 ZP2-T4030WK ZP2-T5030WK ZP2-T6030WK ZP2-T8030WK 04 06 13.9 8 14.7 10 04 06 04 06 04 06 0.5 77 2 x 2.5 0.8 20 Series ZP2 Male thread mounting Female thread mounting How to Order ZP2 R 3507 W N 04 A5 Without

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Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Base Mounted Metal Seal/Rubber Seal Series VQ

Applicable fitting size d 3.2 6 8 A L D Model 3.2 4 6 16 16 18 31.5 32 35 KQ2P-23 KQP-04 KQP-06 VQC When ordering assemblies incorporated with a manifold, add suffix -D to the manifold no. DIN rail mounting bracket [-D] VVQ0-57A-5 (VQ0) SQ It is used for mounting a VV5Q05 type manifold on a DIN rail. The DIN rail mounting bracket is fixed to the manifold end plate.

4/5 Port Solenoid Valve

23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For monifold mounting) One-touch fitting (A, B port)

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Max.14 SV1 00-06 SV1 00-05 Individual SUP spacer 61 (N7:7) (C6:3.2) 10 B B B B (7.5) (DIN rail dimension) 109.5 111.4 118 102.9 11.8 100.4 91.9 A A A A 90 B A B A B A B A Dimensions are the ones for SV1300.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

B A A A B B B B A A A A SY 3 L1 L2 SV 2 11 11 71.5 (Pitch) P = 51 (Pitch) P = 51 71.5 6 [2] 1 SYJ 2n x 1/2, 3/4 (A, B port) Stations SZ 24 [23] 70 [71 .5] 58 28 105.5 176.5 209 9 9 20 2n x 1/2 VP4 D side Plug assembly: VVFS2000-30A(Option: Refer to page 1326.)

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

Metal Seal/Rubber Seal Series VQ Body Ported

A L D Model Applicable fittings size d KQ2P-23 KQ2P-04 KQ2P-06 3.2 4 6 31.5 32 35 5 6 8 16 16 18 When ordering assemblies incorporated with a manifold, add suffix -D to the manifold no. DIN rail mounting bracket VVQ1000-57A-3 It is used for mounting a manifold on a DIN rail. The DIN rail mounted bracket is fixed to the manifold end.

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Micro Mechanical Valve Series VM1000

1.5 R port (3 port only) Symbol 2 port (A) 2 12 10 1 (P) 44 25.4 17 (A) 2 3 port 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 14 8.5 12 10 1 (P) 3 (R) Panel mounting hole * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Max. 6 Push button (Extended) VM122-M5-32 (R, B, G, Y) A VM132-M5-32 (R, B, G, Y) A 23 38 T.T. 3 1.5 1.5 (75.6) (52.1) 23.5 22.1 30 10.5 R port (3 port only) Symbol 2 port (A) 2

0.4

P=11.5 1 2 3 4 5 6 7 8 n: Stations 40.5 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 23 04 06 08 Applicable fittings size d 3.2 4 6 8 A A L D Model KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 It is inserted into an unused cylinder port and SUP/EXH ports.

VFR

1Bore size , VV5FR5-01FUStation 1Bore size Light/Surge voltage suppressor 235.5 204 (72) 60 11 4 60 U side Manual override (Non-locking) 6 [2] 21 R5.5 B B B B A A A A n B B B A A A B B B B A A A A 3 L1 L2 2 11 11 71.5 (Pitch) P = 51 Pitch P = 51 71.5 1 Stations 2n-Rc 1/2, 3/4 (A, B port) 20 24 [23] 105.5 176.5 209 Plug assembly: VVZS3000-21A(Option: Refer to page 3-5-8.) 2n-Rc 1/2 58 28 70

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To connect a drain discharge pipe, use a pipe with a minimum bore of 10, and a maximum length of 5 m. Avoid using a riser pipe.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.