ZP

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

CATALOG

110V No/2 Wire ACCESSORIES SWITCH BANDS FOR SWITCHES D-B7, D-B8, D-G7 ACCESSORIES SWITCH BANDS FOR SWITCHES D-B5, D-B6, D-G5, D-K5 ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01 3/4 BA-02 1 BA-32 1 1/4 BA-04 1 1/2 BA-05 2 BA-06 2 1/2 BMA1-020 3/4 BMA2-025 1 BMA2-032 1 1/4 BMA2-040 1 1/2 BMA2-050 2 BMA2-063

ZP

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Table of Contents

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max.

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

ZP

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Table of Contents

size A, B P , EA, EB Connector mounting direction Symbol 03 04 3 8 1 2 1 2 Symbol Applicable base With connector M Mixed D Nil 01T, 10, 40 D side mounting None For bottom ported: Rc 3/8 only.

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

AS

A (1) (2) L4 (1) (2) Mass (g) Model M1 D1 D2 L1 L2 L3 d T H Min.

Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

AC

10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Table of Contents

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

position SV Nil 02 2 stations D U D side U side Q CE-compliant 2 to 10 stations ... ...

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting D U Symbol A, B P , EA, EB D side mounting SY Passage Porting specifications (A, B) EA, EB P 03 04 M Mixed 3 8 Symbol 1 2 1 2 SV 1 2 Side Bottom D side For bottom ported: Rc 3/8 only.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D U D side mounting U side mounting Port size 2 2 stations Symbol 04 06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B