Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

CG5-S

Mineral oil A A A C A A 18 Sodium hypochlorite (2%, Room temperature) A C D A D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B D A A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Table of Contents

Non inductive (A) Non inductive (A) IS3 10 Model Load Load resistance Light load Inductive load Motor load Load resistance IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) Circuit Rated voltage (V) N.O.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

VQZ1000/2000/3000

VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

KR

(mm) Note) A Weight (g) D1 D2 L1 M L2 Model Nylon Urethane Applicable tubing KGW04-M5 KGW04-01 8 18 30 37.5 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 x 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 30.5 40 33.5 42.5 3.0 3.0 8 8 1 8 10 6 12.8 17 20 10 1 4 KGW06-02 46 46.5 17 14 10.9 8.6 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 43.5 49.5 47 51

Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Free Mount Cylinder Series CU

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

assembly DXT031-38-1A Applicable individual EXH spacer assembly DXT155-17-1A Stations VV5F3 05 40 2 02 R port 02 2 stations P port 20 20 stations A, B port 3-4-25 26 Series VF3000 B Mount (Integrated type) Applicable solenoid valve Bottom ported/Individual EXH type Type 50 VV5F3 05 50 4 02 VF350Applicable blanking plate assembly DXT031-38-1A EXH (R) port (Valve body) Stations 02 2 stations

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

AC Servo Motor Driver (Pulse input type/Positioning type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSB2-T5 30 A frame 5 A S-N10 10 LECSB2-T7 LECSB2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSB2-T9 30 A frame 15 A 30 A

NCG/CG1

37 37 38 38 32 or larger: The same as A 39 39 40 40 Note) In the case of cylinders with auto switches, magnets are installed in the piston.

Fieldbus system EtherCAT compatible SI Unit

Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 DX#B DY#B LAB1 LBB1 SEC3 Digital Digital output IO-Link IO-Link SI unit input Class A Class B End Valve plate 1 byte 38 bytes 38 bytes Input Input Input 1 byte 38 bytes 38 bytes 4 bytes Output Output Output Output Input date: (Unit 0) Digital input unit (EX600-DX#B): 1 byte occupied Input date: (Unit 2) IO-Link master unit (EX600-LAB1): 38 bytes occupied

5 Port Solenoid Valve

Double check block 86 Series S0700 Plug Lead Manifold Bar Base Manifold Optional Parts Blanking plug (For one-touch fittings) KJP-02 L A 23 KQ2P-04 06 Dimensions (mm) Applicable fitting size d 2 3.2 4 6 Model Weight (g) KJP-02 KQ2P-23 KQ2P-04 KQ2P-06 A L D D 8.2 16 16 18 17 31.5 32 35 3 3.2 6 8 0.1 1 1 1 Silencer (For manifold EXH port) 38 AN110-01 13 Silencer is installed in the EXH port

AC Servo Motor Driver (Network card type ）

stop (e.g. a large load is mounted on a carrier). 7 14 7.