Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of

NCG/CG1

D-M9 A/D-M9 AV (With indicator light) D-M9NAV V A B 9 M D A B 9 M D A N 9 M D D-M9PAV D-M9PA Auto switch part no.

Compact 5-Port Solenoid Valve

(A)4 2(B) 4(A) 2(B) 6 0.91 V 3(EB) (EA)5 1 (P) 24 VDC 5(EA) 3(EB) 1(P) JSY3000 N.O. valve x 2 pcs. 3-position closed center (A)4 2(B) 2(B) 4(A) 8 2.77 V V 10 (EA)51 3(EB) (P) 3(EB) 5(EA) 1(P) JSY5000 3-position exhaust center N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) (A)4 2(B) 12 6.59 V V 12 (EA)51 3(EB) (P) 3(EB) 5(EA) 1(P) V Standard v Option G Made to Order Manifold Options MIndividual

V100

S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type VQZ VZ VS For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] VFN Light/Surge voltage suppressor Electrical entry Nil R U Z For DC, AC Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 24 V, 12 V, 6 V, 5 V, 3 VDC/100

24

v v v v v v -XC89W v v v v v v v -XC91 v v v v v v -XC92 v v v v v v v -X144 -X867 D-X 429 B C O N T E N T S Compact Guide Cylinder MGP Series PCompact Guide Cylinder/Basic Type MGP-Z Series How to Order Page 432 Specifications Page 433 Clean Series Page 435 Water Resistant Cylinder Page 435 Cylinder with Stable Lubrication Function (Lube-retainer) Page 436 Guide Unit with Lube-retainer

10

(Smooth Cylinder) MBlQ Note 6) MBK-Z (Non-rotating rod type) MBB Note 6) (With end lock) MBY-Z Note 2) (Low friction type) Double acting CJ1 Single rod Double rod Single rod Single rod Single rod CJP Air Rubber Air Rubber Air Note 9) 408 412 416 Best Pneumatics No.w-3 424 CJ2 32 to 100 Symbol JCM V V V V V V V Standard v v v v v v v Long st CM2 V V V V V V V D CM3 V V V V V v v MBl-lJ K

MY1

function Wiring (Output) Type DC AC 0.5 (Nil) 3 (L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V

Air Cylinder Series CA2

/M9(V)/M9W(V)/M9A(V)L types.

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

4/5 Port Solenoid Valve

light: 1.07)] 1.15 (With light: 1.30) 1.27 (With light: 1.46) [1.39 (With light: 1.60)] 100 V 110 V [115 V] 200 V 220 V [230 V] 1 (P) 1 (P) 5 (R1) 3 (R2) 3 (R) Apparent power VA 2 position double 2 position double AC (B) 2 (A) 4 (A) 4 (B) 2 Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) Surge voltage suppressor Indicator light 1 (P) 5 (R1)

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length (m) Load voltage Auto switch model Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) IC circuit A76H 5 V Reed switch Solid state switch Grommet A72H A73H A72 A73 A73C 200 V 100 V Yes Relay, PLC 12 V 2-wire Connector 24 V Diagnostic

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Table of Contents

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

Rotary Actuator/Vane Type

CRJ X Y1 X Y1 h L1 b CRA1 Z Z b (h9) h (h9) L1 4 0 0.030 4 0 0.030 20 2 x Q2 B port A port 2 x Q3 CRQ2 B port A port 2 x Q3 A A MSQ F A parallel key is used instead of single flat for size 40.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Brown Black Red Black Orange Black Y ellow Black Vcc GND A A B B Z Z Connector B terminal no.

Table of Contents

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet