VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

High-precision Digital Pressure Switch

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -41No.PS-OMW0002-C [F11] Display resolution setting This function is to change the pressure display resolution.

Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 20, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V1 (Mounting Position: V + AF + AR*K), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator),

Body Size: 20, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V1 (Mounting Position: V + AF + AR*K), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator

Pressure Switch: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: Mounting Position: V + AF + AR*K, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z

Digital Pressure Switch: Round Type Pressure Gauge, w/Limit Indicator, Attachment: Mounting Position: V + AF + AR*K, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z

Pressure Switch: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: Mounting Position: V + AF + AR*K, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z

PFM7

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 T Panel mount adapter (For without flow adjustment valve) R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) Nil None ZS-33-J ZS-33-M

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Digital Pressure Switch

Voltage resistance Z Zero clear (function) Adjusts the displayed pressure value to "0". -13No.PS-OMH0003-F Mounting and Installation Piping Piping connection Connect the fitting to piping. When piping, tighten to an appropriate torque of 13.6 to 15 Nm for ISE70 series and 25 to 28 Nm for ISE75/75H series.

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

I

E R S E R I E S V Y D I M E N S I O N S S E E N E X T P A G E VY1 O O P T I O N T H R E A D B Bracket F Foot (A and 1 body sizes only) G Gauge (not available on D body) N Silencer P I L O T 0 Internal 1 External (not on VYID00) Nil Rc(PT) T NPTF F G(PF) N NPT) B O D Y S I Z E P O R T S I Z E Mounting Type Symbol Symbol P,A port R port Cv Hysteris Sensitivity Repeatability Notes: 1.

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

AC Servo Motor Driver (Pulse input type/Positioning type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

AC Servo Motor Driver (Network card type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

Digital Pressure Switch

Withstand voltage Z Zero-clear function This function to adjust the displayed pressure to zero. -15No.PS-OMU0009-D Mounting and Installation Installation Mounting Mount the optional bracket and panel mount adapter to the pressure switch.