Fieldbus system Ethernet POWERLINK compatible SI unit

0 (Slot 0) RO 2004h 00h AMB, analog IN Ch 1 (Slot 0) RO 2005h 00h DMF, IN 0 7 (Slot 1) RO 2006h 00h DXF, IN 0 15 (Slot 2) RO : : : 2020h 00h RO Output data Index Sub Index Bit 15 8 Bit 7 0 Access 2065h 00h AMB, analog OUT Ch 2 (Slot 0) RW 2066h 00h AMB, analog OUT Ch 3 (Slot 0) RW 2067h 00h DMF, OUT 0 7 (Slot 1) RW 2068h 00h DYF, OUT 0 15 (Slot3) RW 2069h 00h SPL1-X26, OUT 0 15 (Slot4

AC Servo Motor Driver (Pulse input type/Positioning type)

Acceleration/de celeration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. 52 - 5.6.2 Motorspeed Configuration Motorspeed (r/min) configuration.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

EX500-GPR1A.eng

Specification Display Item P-ch MOS-FET ( open drain ) EX9-OET1 N-ch MOS-FET ( open drain ) EX9-OET2 Specification P-ch MOS-FET ( open drain ) EX9-OEP1 EX9-OEP2 2. EX9-PE1 1. EX9-OET1/EX9-OET2/EX9-OEP1/EX9-OEP2 Settings for display PWR PWR PWR Turns on: Power is supplied from external power supply.

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

Table of Contents

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

4-channel Flow Monitor ( compatible)

enable/disable IO-Link 22 3 Step Setting Mode 29 Simple Setting Mode 31 Function Selection Mode 32 Function selection mode 32 Default setting 32 F 1 Setting of OUT1 34 F 2 Setting of OUT2 39 F 3 Digital filter setting 42 F10 Sub display setting 43 F14 Zero cut-off setting 48 F20 External input setting 49 F30 Accumulated flow value hold setting 50 F80 Power saving mode 51 F81 Security code 52

PF2D

1 q t i 385 PF2D Series Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A 4 x 4.5 52 1 18 PF2D540-19 Internal Circuits and Wiring Examples 78 86 186 -1/2 Analog voltage output Analog current output 56 15 Sensor Monitor PF2D3 Black Output for PF2D3 4 8 Switch output Main circuit Main circuit Main circuit Main circuit 3 7 U DC

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

Cylinder with Lock

CH CN d3 EN ER (Max.) EU G1 G2 G3 (Max.)

C95

8 5.4-52 -XC12 Tandem cylinder !

C95

4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52

CNG

52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) 20 25 32 40 K KA MM NA PG PH PL S FD FT FX FY FZ XA XB P I J l ZZ H e f h ZZ 26 35 178 (186) 30 22 55 198 (206) 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 5.5 6 52 25 65 3 12 M4 x 0.7 0.25 x Stroke 31 40 193 (201) 30 24 62 215 (223) 5.5 8 M10 x 1.25

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Stroke B Stroke A NB GC NA L8 + Stroke (A + B) ZZ + Stroke (A + B) Stroke B Stroke A GC Bore size (mm) L8 ZZ NA NB 32 198 294 74 10 36 40 220 328 85 10 38 NB 50 222 360 85 10 41 GC 63 252 390 100 10 43 NA L8 + Stroke (A + B) 80 270 442 104 14 52 100 290 472 114 14 52 ZZ + Stroke (A + B) 125 334 572 130 14 52 88 Made to Order Series CP96/C96 Symbol -XC11 Dual Stroke Cylinder/Single Rod Type

C95

4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52

LEC-OM02704CN

5.1.1 52 5.1.2 53 5.1.3 54 5.2 55 5.2.1 55 5.2.2 56 5.2.3 57 5.2.4 58 5.2.5 59 5.2.6 59 5.3 5-10 5.4 5-12 5.4.1 5-12 5.4.2 5-14 5.4.3 5-26 5.5 5-32 5.5.1 JOG 5-32 5.6 5-34 5.6.1 5-34 5.6.2 DOG 5-36 5.6.3 5-38 5.6.4 5-40 5.6.5 5-41 5.6.6 (ON) 5-43 5.6.7 DOG 5-44 5.6.8 5-46 5.6.9 DOG CRADLE 5-48 5.6.10 DOGZ 5-50 5.6.11 DOG 5-52 5.6.12 DOG

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 125 ES5125 20 30 13.5 94 124 17 70 60 90 37

CP95

angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52

CP95

MB ZZ + Stroke MB1 CA2 CS1 CP95SB Bore size Stroke W C76 C85 C95 CP95 NCM NCA DVD -X AM WH WH + Stroke L8 + Stroke H 20ZY + Stroke Data Bore size (mm) AM KK L8 SW B D G EE BG (MIN) PL RT I12 E R VD VA I9 WA WB WH ZZ ZY I2 M10 x 1.25 32 6 16 94 22 30 10 27 12 G 1/8 13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52