2 Phase Stepper Motor/Without Motor Brake Series LXS

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

x 1.75 10 26 131 Bore size [mm] M MM N P PG PH PL PW S FV FD FT FX FY FZ Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1

1

P CXWM10, CXWL10 4-J Herical insert thread depth K F P 4-M4 x 0.7 Helical insert thread depth 6 CXWM16 CXWL16 F 25 35 32.5 37.5 42.5 55 67.5 80 F 34.5 47 53 53 65.5 78 90.5 103 P 25 30 60 75 90 90 90 90 P 52 52 65 90 90 90 90 90 I I CXWM10 CXWL10 Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm F 21 26 26 26 F 35.5 38

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

K F MA A NA FT R NB M Air release SS + Q + l + Stroke S + Stroke SS FZ ZZ + Stroke ZZ + Q + l + Stroke (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 38 16 21 15 11 37 31 3/8 39 130 11 11 40 88 109 30 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 45 12 21 15 11 36 30 3/8 42 130 11 11 46 95 118 30 52 12 15 25

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

High Purity Fluoropolymer

H E L1 M N L2 Rc (NPT) Port size Y LQ2L21-F LQ2L22-F LQ2L23-F LQ2L24-F LQ2L31-F LQ2L32-F LQ2L33-F LQ2L34-F LQ2L35-F LQ2L36-F LQ2L41-F LQ2L42-F LQ2L43-F LQ2L44-F LQ2L51-F LQ2L52-F LQ2L53-F LQ2L54-F 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 1/8" 24 38 19.9 19 18 (L2) 1/4" 26 (M) SMC 43 1/4" (E) H 42.5 (L1) Class 2, 3 28 26.2 22 24 43 3/8" 42.5 52 51 52 51 59 58 59 58 3/8" 50.5 21 33.1

V100

M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23

CLA

thread If ~I Fl .~ ~ lII m ~f o 4-oLD Io!

LJ1H

m 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 52 53 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Table of Contents

M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats 7 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 I H G F E D A B C Model 7 8 15 16 5.5 6 6.5 8.5 1.8 2.5 7 8 12 13.5 8.5 9.5 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L

Table of Contents

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Scale: 30% Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 52 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Note) Dimensions L1 to L4 of SS5Y5-M45Stations D are the same as SS5Y5-M45Stations U.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Standard) 2 position double With surge voltage suppressor (G)(L) (M)(D) With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B EA/EB) 48 VAC 50/60 Hz 110 VAC 50/60 Hz 3 position closed center 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC VZ3000 Base

Air Cylinder Series MB

0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 694 Cylinder with Lock Series MNB Selection Graph Graph (5) Graph (2) P P 100 80 63 100 CLJ2 50 40 80 m m 63 CLM2 32 50 40 CLG1 32 CL1 MLGC CNG MNB V V CNA Graph (6) Graph (3) P P CNS 100 80 CLS 63 100 50 40 CLQ 80 63 50 m m RLQ 32 40 MLU 32 !"

ZP

61 68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of