HRX-OM-Q026

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Dual Rod Cylinder Series CXSJ/CXS

) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C D E G H I J K L M N P NN F Model 2 x 5.5 through 2 x M4 x 0.7 thread depth 6 2 x M5 x 0.8 thread depth 7.5 2 x M5 x 0.8 thread depth 8 CXS20 64 25 62 23 11.5 50 28 6 12 12 30 10 53 2 x M5 x 0.8 2 x 9.5 counterbore depth 5.3 2 x 6.9 through CXS25 80 30 78 28 14 60 35 6 12 12 30 12

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

3

Qty. 1 2 3 4 PVC pipe Seal Body Sensor PVC pipe (25A) PVC pipe (30A) 1 1 CPVC ZS-40-U25 ZS-40-U30 1 FKM PPS PPS 25A retaining plate (M5 x 80 with two hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor

Table of Contents

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

Compact Cylinder

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN There are other applicable auto switches other than the listed above. For details, refer to page 127.

NCQ2/CQ2

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L (N)CQ2B12-5S (N)CQ2B12-5T CQ-M3 x 25L 6.5 6.5 -10S (N)CQ2B16-5S (N)CQ2B16-5T CQ-M3 x 25L 5 5 -10S (N)CQ2B20-5S (N)CQ2B20-5T CQ-M5 x 25L 7.5 7.5 -10S (N)CQ2B25-5S (N)CQ2B25-5T CQ-M5 x 30L 9.5 9.5 -10S (N)CQ2B32-5SZ (N)CQ2B32-5TZ CQ-M5 x 30L 9 9 -10SZ (N)CQ2B40-5SZ (N)CQ2B40-5TZ CQ-M5 x 35L 7.5 7.5 -10SZ (N)CQ2B50-10SZ (N)CQ2B50-10TZ CQ-M6 x

Table of Contents

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

Smooth Cylinder/Low Speed Cylinder

1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

5-Port Solenoid Valve

1.5 m, 3 m 8.8 (6) (9.3) 18 (17.9) (A, B port: 12) 4 x M5 Mounting hole (Recommended tightening torque: 2.9 Nm) L2 1.5 42.7 Connector Connecting Base (L4) (DIN rail mounting hole pitch: 12.5) (Fitting for the type with P/E ports on the U and/or D sides) (5.3) 18 (L3) (Station 1) (Station n) D-sub, Flat Ribbon One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12, 1/2" Terminal

Mechanically Jointed Rodless Cylinder Series MY1

plug) G G GB Cushion needle M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 2 x 2 x J depth K (Hexagon socket head plug) (WW) (WW) M5 x 0.8 XX XX (Hexagon socket head plug) M5 x 0.8 (Port) VV VV 2 x M5 x 0.8 2 x M5 x 0.8 MY1MG MY1MG (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

CATALOG

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane