Coolant Valve

/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 7 Valve size 1 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1

Process Valve

/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

High Pressure Coolant Valve

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

Lightweight and Compact

C 5 to 45 Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating fluid system Rated flow 50/60 Hz (Outlet)6 L/min 29/45 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

New

Tightening Torque for Piping Connection thread Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Rc1 1/2 Rc2 Rc2 1/2 Rc3 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 48 to 50 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. 5.

Proposals for Energy Saving

Type 2 VNC 15A 1 1 1 A T Actuators Manual override Valve size Valve type Port size Rated voltage Symbol Nil Air operated type Port size Rc Valve size 1 Orifice size (mm) Symbol 1 2 4 2 200VAC, 50/60Hz 1 100VAC, 50/60Hz Symbol N.C. 0.5MPa N.O. 1MPa N.C. 1MPa 3 110VAC, 50/60Hz 4 220VAC, 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 1/8 1/4 3/8 3/8 1/2 3/4 7 5 24VDC 6 12VDC 7 240VAC, 50/60Hz 15

VQ5000

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.

VNC

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 2 2 3 1 2 3 2 3 4 B B C A B C B C D 6 x 4 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 1/4" x 5/32" 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 12 x 10 1/2" x 3/8" 19 x 16 3/4" x 5/8" 25 x 22 1" x 7/8" Dimensions Union Flange: LQ3F Metric Size (S) T P M L2 L2 L1 L1

DOC1001322

, Barrel nipple 25A, Accessories Anchor bracket 2pcs.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1 L = 50 mm Max. speed = Over 200 mm/s !

Compact

77 91 Side support B MY-S25B M6 x 1 35 77 8 50 91 A set of side supports consists of a left support and a right support.

Table of Contents

/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A) 3 4 10 (25A) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.

VQ7-6/7-8

50 68.5 76.5 145 86.5 155 50 50 68.5 13 (port B) 13 (port A) 13 (port B) 13 (port A) Manual override Manual override B A B A B B 38 50 62 38 50 62 Indicator light R1 P R2 R1 R2 Indicator light 2-6.5 Mounting hole 2-6.5 Mounting hole 42.5 42.5 42.5 42.5 G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 125.5 137.5 125.5 137.5 37 93 37 93 25 (port X) 25 (port X) 5 3 3 5 22 22 14 14 1 1 2-Rc3/8

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.